JPS63110571U - - Google Patents
Info
- Publication number
- JPS63110571U JPS63110571U JP173887U JP173887U JPS63110571U JP S63110571 U JPS63110571 U JP S63110571U JP 173887 U JP173887 U JP 173887U JP 173887 U JP173887 U JP 173887U JP S63110571 U JPS63110571 U JP S63110571U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- disk
- shape
- mask
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims 1
- 238000007493 shaping process Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP173887U JPS63110571U (enExample) | 1987-01-09 | 1987-01-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP173887U JPS63110571U (enExample) | 1987-01-09 | 1987-01-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63110571U true JPS63110571U (enExample) | 1988-07-15 |
Family
ID=30779927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP173887U Pending JPS63110571U (enExample) | 1987-01-09 | 1987-01-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63110571U (enExample) |
-
1987
- 1987-01-09 JP JP173887U patent/JPS63110571U/ja active Pending
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