JPS63159300U - - Google Patents
Info
- Publication number
- JPS63159300U JPS63159300U JP5147387U JP5147387U JPS63159300U JP S63159300 U JPS63159300 U JP S63159300U JP 5147387 U JP5147387 U JP 5147387U JP 5147387 U JP5147387 U JP 5147387U JP S63159300 U JPS63159300 U JP S63159300U
- Authority
- JP
- Japan
- Prior art keywords
- injection device
- shielding means
- particle injection
- plates
- neutral particle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007935 neutral effect Effects 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 6
- 238000002347 injection Methods 0.000 claims description 5
- 239000007924 injection Substances 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5147387U JPS63159300U (enExample) | 1987-04-03 | 1987-04-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5147387U JPS63159300U (enExample) | 1987-04-03 | 1987-04-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63159300U true JPS63159300U (enExample) | 1988-10-18 |
Family
ID=30875768
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5147387U Pending JPS63159300U (enExample) | 1987-04-03 | 1987-04-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63159300U (enExample) |
-
1987
- 1987-04-03 JP JP5147387U patent/JPS63159300U/ja active Pending