JPH01153360U - - Google Patents
Info
- Publication number
- JPH01153360U JPH01153360U JP1988051206U JP5120688U JPH01153360U JP H01153360 U JPH01153360 U JP H01153360U JP 1988051206 U JP1988051206 U JP 1988051206U JP 5120688 U JP5120688 U JP 5120688U JP H01153360 U JPH01153360 U JP H01153360U
- Authority
- JP
- Japan
- Prior art keywords
- irradiation
- beam current
- irradiated object
- irradiated
- bias resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988051206U JPH01153360U (enExample) | 1988-04-15 | 1988-04-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988051206U JPH01153360U (enExample) | 1988-04-15 | 1988-04-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01153360U true JPH01153360U (enExample) | 1989-10-23 |
Family
ID=31277237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988051206U Pending JPH01153360U (enExample) | 1988-04-15 | 1988-04-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01153360U (enExample) |
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1988
- 1988-04-15 JP JP1988051206U patent/JPH01153360U/ja active Pending