JPS62127653U - - Google Patents
Info
- Publication number
- JPS62127653U JPS62127653U JP1470086U JP1470086U JPS62127653U JP S62127653 U JPS62127653 U JP S62127653U JP 1470086 U JP1470086 U JP 1470086U JP 1470086 U JP1470086 U JP 1470086U JP S62127653 U JPS62127653 U JP S62127653U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- lens
- slit
- beam generator
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 7
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1470086U JPS62127653U (enExample) | 1986-02-03 | 1986-02-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1470086U JPS62127653U (enExample) | 1986-02-03 | 1986-02-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62127653U true JPS62127653U (enExample) | 1987-08-13 |
Family
ID=30804928
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1470086U Pending JPS62127653U (enExample) | 1986-02-03 | 1986-02-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62127653U (enExample) |
-
1986
- 1986-02-03 JP JP1470086U patent/JPS62127653U/ja active Pending