JPS62127653U - - Google Patents
Info
- Publication number
- JPS62127653U JPS62127653U JP1470086U JP1470086U JPS62127653U JP S62127653 U JPS62127653 U JP S62127653U JP 1470086 U JP1470086 U JP 1470086U JP 1470086 U JP1470086 U JP 1470086U JP S62127653 U JPS62127653 U JP S62127653U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- lens
- slit
- beam generator
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 7
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Description
第１図は本考案の実施例を示す。第２図は従来
の電子ビーム発生装置を示す。
１…電子ビーム、２…第１のレンズ、３…スリ
ツト板、３′…スリツト、４…第２のレンズ、５
…ターゲツト。
FIG. 1 shows an embodiment of the invention. FIG. 2 shows a conventional electron beam generator. DESCRIPTION OF SYMBOLS 1... Electron beam, 2... First lens, 3... Slit plate, 3'... Slit, 4... Second lens, 5
...Target.
Claims (1)
に、該電子ビームを拡大する第１のレンズ、該拡
大した電子ビームを通過させるスリツトを備える
スリツト板、該スリツトを通過した電子ビームを
集束させる第２のレンズ及びターゲツトを配置し
た電子ビーム発生装置。 A first lens for enlarging the electron beam from the electron beam generator, a slit plate having a slit for passing the enlarged electron beam, and a second lens for converging the electron beam that has passed through the slit. An electron beam generator equipped with a lens and a target.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1470086U JPS62127653U (en) | 1986-02-03 | 1986-02-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1470086U JPS62127653U (en) | 1986-02-03 | 1986-02-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62127653U true JPS62127653U (en) | 1987-08-13 |
Family
ID=30804928
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1470086U Pending JPS62127653U (en) | 1986-02-03 | 1986-02-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62127653U (en) |
-
1986
- 1986-02-03 JP JP1470086U patent/JPS62127653U/ja active Pending
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