JPS62201457U - - Google Patents

Info

Publication number
JPS62201457U
JPS62201457U JP12385486U JP12385486U JPS62201457U JP S62201457 U JPS62201457 U JP S62201457U JP 12385486 U JP12385486 U JP 12385486U JP 12385486 U JP12385486 U JP 12385486U JP S62201457 U JPS62201457 U JP S62201457U
Authority
JP
Japan
Prior art keywords
ion beam
ion
mass spectrometer
processing
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12385486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP61003625A external-priority patent/JPH083733B2/ja
Application filed filed Critical
Priority to JP12385486U priority Critical patent/JPS62201457U/ja
Publication of JPS62201457U publication Critical patent/JPS62201457U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP12385486U 1986-01-13 1986-08-12 Pending JPS62201457U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12385486U JPS62201457U (enExample) 1986-01-13 1986-08-12

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP61003625A JPH083733B2 (ja) 1986-01-13 1986-01-13 数値制御装置の原点復帰方式
JP12385486U JPS62201457U (enExample) 1986-01-13 1986-08-12

Publications (1)

Publication Number Publication Date
JPS62201457U true JPS62201457U (enExample) 1987-12-22

Family

ID=31189656

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12385486U Pending JPS62201457U (enExample) 1986-01-13 1986-08-12

Country Status (1)

Country Link
JP (1) JPS62201457U (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002343299A (ja) * 2001-05-18 2002-11-29 Denso Corp イオン注入機
JP2007500430A (ja) * 2003-05-23 2007-01-11 アクセリス テクノロジーズ インコーポレーテッド イオン注入装置およびシステム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002343299A (ja) * 2001-05-18 2002-11-29 Denso Corp イオン注入機
JP2007500430A (ja) * 2003-05-23 2007-01-11 アクセリス テクノロジーズ インコーポレーテッド イオン注入装置およびシステム

Similar Documents

Publication Publication Date Title
CA2218158A1 (en) Mass spectrometer system and method for transporting and analyzing ions
JPS62201457U (enExample)
JPS6314358U (enExample)
JPH0211159U (enExample)
JPS6399752U (enExample)
JPH0388258U (enExample)
JPS6312153U (enExample)
JPH0292656U (enExample)
JPS63106055U (enExample)
JPS63110566U (enExample)
JPS6161459U (enExample)
JPH02129660U (enExample)
JPS61100874U (enExample)
JPS58184763U (ja) イオン源の機能を付加した平行平板型静電アナライザ
JPH0192752U (enExample)
JPS62160455U (enExample)
JPS569957A (en) Combined unit of ion gun, electron gun and analyzer in auger electron spectroscope
JPS5945849U (ja) イオン注入装置
JPH0316655U (enExample)
JPH0455746U (enExample)
WO2003024572A3 (en) A mass spectrometer for simultaneous detection of reflected and direct ions
JPH0178167U (enExample)
JPH10208687A (ja) イオン注入装置
SINHA Analysis of biological particles by mass spectrometry[Final Technical Report, Jun. 1981- Jun. 1984]
JPS63153167U (enExample)