JPS63121438U - - Google Patents
Info
- Publication number
- JPS63121438U JPS63121438U JP1413287U JP1413287U JPS63121438U JP S63121438 U JPS63121438 U JP S63121438U JP 1413287 U JP1413287 U JP 1413287U JP 1413287 U JP1413287 U JP 1413287U JP S63121438 U JPS63121438 U JP S63121438U
- Authority
- JP
- Japan
- Prior art keywords
- rotating holder
- ion source
- sample
- ion beam
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 5
- 238000000605 extraction Methods 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Electron Sources, Ion Sources (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1413287U JPS63121438U (enExample) | 1987-02-02 | 1987-02-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1413287U JPS63121438U (enExample) | 1987-02-02 | 1987-02-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63121438U true JPS63121438U (enExample) | 1988-08-05 |
Family
ID=30803837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1413287U Pending JPS63121438U (enExample) | 1987-02-02 | 1987-02-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63121438U (enExample) |
-
1987
- 1987-02-02 JP JP1413287U patent/JPS63121438U/ja active Pending