JPS61150856U - - Google Patents
Info
- Publication number
- JPS61150856U JPS61150856U JP3403985U JP3403985U JPS61150856U JP S61150856 U JPS61150856 U JP S61150856U JP 3403985 U JP3403985 U JP 3403985U JP 3403985 U JP3403985 U JP 3403985U JP S61150856 U JPS61150856 U JP S61150856U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- receiving jig
- deposited
- vaporized
- deposition surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 6
- 230000007246 mechanism Effects 0.000 claims description 2
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 3
- 210000000078 claw Anatomy 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3403985U JPS61150856U (enExample) | 1985-03-09 | 1985-03-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3403985U JPS61150856U (enExample) | 1985-03-09 | 1985-03-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61150856U true JPS61150856U (enExample) | 1986-09-18 |
Family
ID=30537045
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3403985U Pending JPS61150856U (enExample) | 1985-03-09 | 1985-03-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61150856U (enExample) |
-
1985
- 1985-03-09 JP JP3403985U patent/JPS61150856U/ja active Pending