JPS61114840U - - Google Patents
Info
- Publication number
- JPS61114840U JPS61114840U JP1984197993U JP19799384U JPS61114840U JP S61114840 U JPS61114840 U JP S61114840U JP 1984197993 U JP1984197993 U JP 1984197993U JP 19799384 U JP19799384 U JP 19799384U JP S61114840 U JPS61114840 U JP S61114840U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- wafer holder
- semiconductor
- heating means
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Feeding Of Workpieces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984197993U JPS61114840U (enExample) | 1984-12-28 | 1984-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984197993U JPS61114840U (enExample) | 1984-12-28 | 1984-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61114840U true JPS61114840U (enExample) | 1986-07-19 |
Family
ID=30756609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984197993U Pending JPS61114840U (enExample) | 1984-12-28 | 1984-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61114840U (enExample) |
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1984
- 1984-12-28 JP JP1984197993U patent/JPS61114840U/ja active Pending