JPS62122862U - - Google Patents
Info
- Publication number
- JPS62122862U JPS62122862U JP991586U JP991586U JPS62122862U JP S62122862 U JPS62122862 U JP S62122862U JP 991586 U JP991586 U JP 991586U JP 991586 U JP991586 U JP 991586U JP S62122862 U JPS62122862 U JP S62122862U
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- ion
- disk
- vacuum
- unloading
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 4
- 239000010408 film Substances 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 238000002347 injection Methods 0.000 claims description 2
- 239000007924 injection Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 5
- 230000015572 biosynthetic process Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP991586U JPS62122862U (enExample) | 1986-01-27 | 1986-01-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP991586U JPS62122862U (enExample) | 1986-01-27 | 1986-01-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62122862U true JPS62122862U (enExample) | 1987-08-04 |
Family
ID=30795682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP991586U Pending JPS62122862U (enExample) | 1986-01-27 | 1986-01-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62122862U (enExample) |
-
1986
- 1986-01-27 JP JP991586U patent/JPS62122862U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR920005623B1 (ko) | 음극 스퍼터링 장치 | |
| JPS62122862U (enExample) | ||
| JPS62122861U (enExample) | ||
| JPS63128710A (ja) | 反応炉 | |
| JPS61291965A (ja) | 超高真空チヤンバ− | |
| JPH0555344A (ja) | 半導体ウエハー収納カセツト保管容器と半導体ウエハー処理装置とのインターフエースシステム | |
| JPH0377274B2 (enExample) | ||
| JPS62142791A (ja) | 真空処理装置 | |
| JPS60238133A (ja) | 真空処理装置 | |
| JPS6245825U (enExample) | ||
| JPS6251171U (enExample) | ||
| Mantilla et al. | High‐speed input/output device for controlled atmospheres | |
| JPH04159918A (ja) | 真空容器用搬出入方法とその装置 | |
| JPS61120756U (enExample) | ||
| JPH01119052U (enExample) | ||
| JP3182496B2 (ja) | 真空ロード・アンロード方法および真空ゲートバルブならびに真空搬送容器 | |
| JPS61120755U (enExample) | ||
| JPH02282087A (ja) | 半導体製品の保管容器 | |
| JPS61176258U (enExample) | ||
| JPH0226030U (enExample) | ||
| JPS6384868U (enExample) | ||
| JPS62106961U (enExample) | ||
| JPH044062U (enExample) | ||
| JP2602954Y2 (ja) | 基板真空処理装置 | |
| JPS6280265A (ja) | 真空処理装置 |