JPS6355214B2 - - Google Patents

Info

Publication number
JPS6355214B2
JPS6355214B2 JP60158157A JP15815785A JPS6355214B2 JP S6355214 B2 JPS6355214 B2 JP S6355214B2 JP 60158157 A JP60158157 A JP 60158157A JP 15815785 A JP15815785 A JP 15815785A JP S6355214 B2 JPS6355214 B2 JP S6355214B2
Authority
JP
Japan
Prior art keywords
pellet
wire bonder
optical system
fan
microairflow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60158157A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6143715A (ja
Inventor
Haruo Amada
Masahiro Horii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60158157A priority Critical patent/JPS6143715A/ja
Publication of JPS6143715A publication Critical patent/JPS6143715A/ja
Publication of JPS6355214B2 publication Critical patent/JPS6355214B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W72/0711—

Landscapes

  • Wire Bonding (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP60158157A 1985-07-19 1985-07-19 ワイヤボンダ Granted JPS6143715A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60158157A JPS6143715A (ja) 1985-07-19 1985-07-19 ワイヤボンダ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60158157A JPS6143715A (ja) 1985-07-19 1985-07-19 ワイヤボンダ

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP8944878A Division JPS5516445A (en) 1978-07-24 1978-07-24 Wire bonder

Publications (2)

Publication Number Publication Date
JPS6143715A JPS6143715A (ja) 1986-03-03
JPS6355214B2 true JPS6355214B2 (enExample) 1988-11-01

Family

ID=15665510

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60158157A Granted JPS6143715A (ja) 1985-07-19 1985-07-19 ワイヤボンダ

Country Status (1)

Country Link
JP (1) JPS6143715A (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5188177U (enExample) * 1975-01-11 1976-07-14
JPS5310268A (en) * 1976-07-15 1978-01-30 Cho Onpa Kogyo Co Method of preventing image of heated semiconductor pellet from flickering of heat haze

Also Published As

Publication number Publication date
JPS6143715A (ja) 1986-03-03

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