JPS6355182B2 - - Google Patents

Info

Publication number
JPS6355182B2
JPS6355182B2 JP57152204A JP15220482A JPS6355182B2 JP S6355182 B2 JPS6355182 B2 JP S6355182B2 JP 57152204 A JP57152204 A JP 57152204A JP 15220482 A JP15220482 A JP 15220482A JP S6355182 B2 JPS6355182 B2 JP S6355182B2
Authority
JP
Japan
Prior art keywords
power supply
electron beam
bias
power
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57152204A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5940450A (ja
Inventor
Masashi Yasunaga
Katsunori Hara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP57152204A priority Critical patent/JPS5940450A/ja
Publication of JPS5940450A publication Critical patent/JPS5940450A/ja
Publication of JPS6355182B2 publication Critical patent/JPS6355182B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241—High voltage power supply or regulation circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP57152204A 1982-08-30 1982-08-30 電子ビ−ム加工装置 Granted JPS5940450A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57152204A JPS5940450A (ja) 1982-08-30 1982-08-30 電子ビ−ム加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57152204A JPS5940450A (ja) 1982-08-30 1982-08-30 電子ビ−ム加工装置

Publications (2)

Publication Number Publication Date
JPS5940450A JPS5940450A (ja) 1984-03-06
JPS6355182B2 true JPS6355182B2 (enrdf_load_stackoverflow) 1988-11-01

Family

ID=15535333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57152204A Granted JPS5940450A (ja) 1982-08-30 1982-08-30 電子ビ−ム加工装置

Country Status (1)

Country Link
JP (1) JPS5940450A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19522221A1 (de) * 1995-06-20 1997-01-02 Zeiss Carl Fa Verfahren zur Regelung des Emissionsstromes einer Elektronenquelle und Elektronenquelle mit einer Regelung des Emissionsstromes
DE102007042108B4 (de) * 2007-09-05 2010-02-11 Siemens Ag Elektronenquelle mit zugehöriger Messwerterfassung

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6241280Y2 (enrdf_load_stackoverflow) * 1980-08-01 1987-10-22
JPS5750757A (en) * 1980-09-10 1982-03-25 Mitsubishi Electric Corp Power source for electron beam generator
JPS5790558U (enrdf_load_stackoverflow) * 1980-11-25 1982-06-03

Also Published As

Publication number Publication date
JPS5940450A (ja) 1984-03-06

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