JPS5940450A - 電子ビ−ム加工装置 - Google Patents

電子ビ−ム加工装置

Info

Publication number
JPS5940450A
JPS5940450A JP57152204A JP15220482A JPS5940450A JP S5940450 A JPS5940450 A JP S5940450A JP 57152204 A JP57152204 A JP 57152204A JP 15220482 A JP15220482 A JP 15220482A JP S5940450 A JPS5940450 A JP S5940450A
Authority
JP
Japan
Prior art keywords
electron beam
power supply
current
beam processing
bias
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57152204A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6355182B2 (enrdf_load_stackoverflow
Inventor
Masashi Yasunaga
安永　政司
Katsunori Hara
原　且則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP57152204A priority Critical patent/JPS5940450A/ja
Publication of JPS5940450A publication Critical patent/JPS5940450A/ja
Publication of JPS6355182B2 publication Critical patent/JPS6355182B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241—High voltage power supply or regulation circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP57152204A 1982-08-30 1982-08-30 電子ビ−ム加工装置 Granted JPS5940450A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57152204A JPS5940450A (ja) 1982-08-30 1982-08-30 電子ビ−ム加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57152204A JPS5940450A (ja) 1982-08-30 1982-08-30 電子ビ−ム加工装置

Publications (2)

Publication Number Publication Date
JPS5940450A true JPS5940450A (ja) 1984-03-06
JPS6355182B2 JPS6355182B2 (enrdf_load_stackoverflow) 1988-11-01

Family

ID=15535333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57152204A Granted JPS5940450A (ja) 1982-08-30 1982-08-30 電子ビ−ム加工装置

Country Status (1)

Country Link
JP (1) JPS5940450A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0750332A3 (de) * 1995-06-20 1998-04-15 Carl Zeiss Verfahren zur Regelung des Emissionsstromes einer Elektronenquelle und Elektronenquelle mit einer Regelung des Emissionsstromes
DE102007042108A1 (de) * 2007-09-05 2009-03-12 Siemens Ag Elektronenquelle

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5732900U (enrdf_load_stackoverflow) * 1980-08-01 1982-02-20
JPS5750757A (en) * 1980-09-10 1982-03-25 Mitsubishi Electric Corp Power source for electron beam generator
JPS5790558U (enrdf_load_stackoverflow) * 1980-11-25 1982-06-03

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5732900U (enrdf_load_stackoverflow) * 1980-08-01 1982-02-20
JPS5750757A (en) * 1980-09-10 1982-03-25 Mitsubishi Electric Corp Power source for electron beam generator
JPS5790558U (enrdf_load_stackoverflow) * 1980-11-25 1982-06-03

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0750332A3 (de) * 1995-06-20 1998-04-15 Carl Zeiss Verfahren zur Regelung des Emissionsstromes einer Elektronenquelle und Elektronenquelle mit einer Regelung des Emissionsstromes
US5808425A (en) * 1995-06-20 1998-09-15 Carl-Zeiss-Stiftung Method for controlling the emission current of an electron source and an electron source having a control circuit for controlling the emission current
DE102007042108A1 (de) * 2007-09-05 2009-03-12 Siemens Ag Elektronenquelle
DE102007042108B4 (de) * 2007-09-05 2010-02-11 Siemens Ag Elektronenquelle mit zugehöriger Messwerterfassung
US8026674B2 (en) 2007-09-05 2011-09-27 Siemens Aktiengesellschaft Electron source and method for the operation thereof

Also Published As

Publication number Publication date
JPS6355182B2 (enrdf_load_stackoverflow) 1988-11-01

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