JPS5750757A - Power source for electron beam generator - Google Patents

Power source for electron beam generator

Info

Publication number
JPS5750757A
JPS5750757A JP55125807A JP12580780A JPS5750757A JP S5750757 A JPS5750757 A JP S5750757A JP 55125807 A JP55125807 A JP 55125807A JP 12580780 A JP12580780 A JP 12580780A JP S5750757 A JPS5750757 A JP S5750757A
Authority
JP
Japan
Prior art keywords
electron beam
transformer
grid
power source
common insulation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55125807A
Other languages
Japanese (ja)
Inventor
Katsunori Hara
Isamu Hosono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP55125807A priority Critical patent/JPS5750757A/en
Publication of JPS5750757A publication Critical patent/JPS5750757A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241—High voltage power supply or regulation circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Direct Current Feeding And Distribution (AREA)

Abstract

PURPOSE:To reduce the cost by employing single insulated transformer while controlling the grid voltage at high potential by means of an electron beam current controller thereby reducing the size and simplifying. CONSTITUTION:Each power sources A, B, C, for filament, shock and grid to be connected to the electron beam acceleration voltage are power supplied from three secondary windings of single common insulation transformer 1d. The electron beam current controller 7b is connected to the secondary winding for the grid power source of the transformer 1d thus to peroform the control of the grid voltage under high potential. When employing a common insulation transformer in such a manner, the common insulation level is achieved while the size is reduced and when reducing the required number of the insulated transformer the wiring work is simplified resulting in the reduction of cost.
JP55125807A 1980-09-10 1980-09-10 Power source for electron beam generator Pending JPS5750757A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55125807A JPS5750757A (en) 1980-09-10 1980-09-10 Power source for electron beam generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55125807A JPS5750757A (en) 1980-09-10 1980-09-10 Power source for electron beam generator

Publications (1)

Publication Number Publication Date
JPS5750757A true JPS5750757A (en) 1982-03-25

Family

ID=14919392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55125807A Pending JPS5750757A (en) 1980-09-10 1980-09-10 Power source for electron beam generator

Country Status (1)

Country Link
JP (1) JPS5750757A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5940450A (en) * 1982-08-30 1984-03-06 Mitsubishi Electric Corp Electron beam machining device
FR2535108A1 (en) * 1982-10-23 1984-04-27 Leybold Heraeus Gmbh & Co Kg AUXILIARY VOLTAGE SOURCE FOR THE POWER SUPPLY OF ELECTRICAL MOUNTS HAVING A HIGH VOLTAGE POTENTIAL
DE102007042108A1 (en) * 2007-09-05 2009-03-12 Siemens Ag electron source

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4817888U (en) * 1971-07-13 1973-02-28

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4817888U (en) * 1971-07-13 1973-02-28

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5940450A (en) * 1982-08-30 1984-03-06 Mitsubishi Electric Corp Electron beam machining device
JPS6355182B2 (en) * 1982-08-30 1988-11-01 Mitsubishi Electric Corp
FR2535108A1 (en) * 1982-10-23 1984-04-27 Leybold Heraeus Gmbh & Co Kg AUXILIARY VOLTAGE SOURCE FOR THE POWER SUPPLY OF ELECTRICAL MOUNTS HAVING A HIGH VOLTAGE POTENTIAL
DE102007042108A1 (en) * 2007-09-05 2009-03-12 Siemens Ag electron source
DE102007042108B4 (en) * 2007-09-05 2010-02-11 Siemens Ag Electron source with associated measured value acquisition
US8026674B2 (en) 2007-09-05 2011-09-27 Siemens Aktiengesellschaft Electron source and method for the operation thereof

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