JPS6352423B2 - - Google Patents

Info

Publication number
JPS6352423B2
JPS6352423B2 JP2028883A JP2028883A JPS6352423B2 JP S6352423 B2 JPS6352423 B2 JP S6352423B2 JP 2028883 A JP2028883 A JP 2028883A JP 2028883 A JP2028883 A JP 2028883A JP S6352423 B2 JPS6352423 B2 JP S6352423B2
Authority
JP
Japan
Prior art keywords
sample
interference
plane
interference member
moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2028883A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59146145A (ja
Inventor
Tsugio Kurata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP2028883A priority Critical patent/JPS59146145A/ja
Publication of JPS59146145A publication Critical patent/JPS59146145A/ja
Publication of JPS6352423B2 publication Critical patent/JPS6352423B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
JP2028883A 1983-02-09 1983-02-09 試料移動装置 Granted JPS59146145A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2028883A JPS59146145A (ja) 1983-02-09 1983-02-09 試料移動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2028883A JPS59146145A (ja) 1983-02-09 1983-02-09 試料移動装置

Publications (2)

Publication Number Publication Date
JPS59146145A JPS59146145A (ja) 1984-08-21
JPS6352423B2 true JPS6352423B2 (ko) 1988-10-19

Family

ID=12022976

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2028883A Granted JPS59146145A (ja) 1983-02-09 1983-02-09 試料移動装置

Country Status (1)

Country Link
JP (1) JPS59146145A (ko)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3133307B2 (ja) * 1989-10-13 2001-02-05 株式会社日立製作所 電子顕微鏡
JP3774558B2 (ja) * 1998-01-23 2006-05-17 日本電子株式会社 荷電粒子ビーム装置における試料装置
JP3850154B2 (ja) * 1998-12-09 2006-11-29 日本電子株式会社 走査型電子顕微鏡
JP2006040761A (ja) * 2004-07-28 2006-02-09 Hitachi High-Technologies Corp 荷電粒子線装置
JP2008218342A (ja) * 2007-03-07 2008-09-18 Hitachi High-Technologies Corp 電子顕微鏡
JP5114338B2 (ja) * 2008-08-08 2013-01-09 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP5936497B2 (ja) 2012-09-14 2016-06-22 株式会社日立ハイテクノロジーズ 荷電粒子線装置及び試料観察方法
JP6035602B2 (ja) 2012-11-21 2016-11-30 株式会社日立ハイテクノロジーズ 荷電粒子線装置、試料台ユニット、及び試料観察方法
JP6063755B2 (ja) * 2013-01-24 2017-01-18 株式会社日立ハイテクノロジーズ 荷電粒子線装置、および円盤状試料観察モジュール
US11458513B2 (en) 2017-06-21 2022-10-04 Hitachi High-Tech Corporation Charged particle beam apparatus and cleaning method

Also Published As

Publication number Publication date
JPS59146145A (ja) 1984-08-21

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