JPS6351493B2 - - Google Patents
Info
- Publication number
- JPS6351493B2 JPS6351493B2 JP57143918A JP14391882A JPS6351493B2 JP S6351493 B2 JPS6351493 B2 JP S6351493B2 JP 57143918 A JP57143918 A JP 57143918A JP 14391882 A JP14391882 A JP 14391882A JP S6351493 B2 JPS6351493 B2 JP S6351493B2
- Authority
- JP
- Japan
- Prior art keywords
- infrared
- support
- pyroelectric
- infrared detector
- pyroelectric material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims description 4
- 230000035945 sensitivity Effects 0.000 description 7
- 238000005530 etching Methods 0.000 description 5
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 235000011118 potassium hydroxide Nutrition 0.000 description 1
- -1 procatechol Chemical compound 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N15/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
- H10N15/10—Thermoelectric devices using thermal change of the dielectric constant, e.g. working above and below the Curie point
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57143918A JPS5932828A (ja) | 1982-08-18 | 1982-08-18 | 赤外線検出素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57143918A JPS5932828A (ja) | 1982-08-18 | 1982-08-18 | 赤外線検出素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5932828A JPS5932828A (ja) | 1984-02-22 |
| JPS6351493B2 true JPS6351493B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-10-14 |
Family
ID=15350121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57143918A Granted JPS5932828A (ja) | 1982-08-18 | 1982-08-18 | 赤外線検出素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5932828A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH073362B2 (ja) * | 1984-06-14 | 1995-01-18 | 株式会社村田製作所 | 一次元焦電型センサアレイ |
| JPH01136035A (ja) * | 1987-11-24 | 1989-05-29 | Hamamatsu Photonics Kk | 焦電型検出素子の製造方法 |
| JPH04132271A (ja) * | 1990-09-21 | 1992-05-06 | Hamamatsu Photonics Kk | 赤外線センサ |
| JPH05305098A (ja) * | 1992-04-28 | 1993-11-19 | Marui Ika:Kk | 自在脳ベラ固定器 |
| US5471060A (en) * | 1993-08-23 | 1995-11-28 | Matsushita Electric Industrial Co., Ltd. | Pyroelectric infrared radiation detector and method of producing the same |
| US5446284A (en) * | 1994-01-25 | 1995-08-29 | Loral Infrared & Imaging Systems, Inc. | Monolithic detector array apparatus |
| JP4702200B2 (ja) * | 2006-06-27 | 2011-06-15 | 株式会社デンソー | 受光器及び当該受光器を備えたレーダ装置 |
| JP5119012B2 (ja) * | 2008-03-11 | 2013-01-16 | 株式会社アドバンテスト | 光検出器 |
| GB201816609D0 (en) | 2018-10-11 | 2018-11-28 | Emberion Oy | Multispectral photodetector array |
| CN113551780B (zh) * | 2021-09-18 | 2021-12-21 | 西安中科立德红外科技有限公司 | 基于半导体集成电路工艺的红外传感器芯片及其制造方法 |
-
1982
- 1982-08-18 JP JP57143918A patent/JPS5932828A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5932828A (ja) | 1984-02-22 |
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