JPS6351356B2 - - Google Patents
Info
- Publication number
- JPS6351356B2 JPS6351356B2 JP55144598A JP14459880A JPS6351356B2 JP S6351356 B2 JPS6351356 B2 JP S6351356B2 JP 55144598 A JP55144598 A JP 55144598A JP 14459880 A JP14459880 A JP 14459880A JP S6351356 B2 JPS6351356 B2 JP S6351356B2
- Authority
- JP
- Japan
- Prior art keywords
- heating resistor
- ceramic
- molybdenum
- resistance value
- silicon nitride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 28
- 239000000919 ceramic Substances 0.000 claims description 27
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 15
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 15
- 229910021332 silicide Inorganic materials 0.000 claims description 10
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 10
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 9
- 229910052750 molybdenum Inorganic materials 0.000 claims description 9
- 239000011733 molybdenum Substances 0.000 claims description 9
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 9
- 229910052721 tungsten Inorganic materials 0.000 claims description 5
- 239000010937 tungsten Substances 0.000 claims description 5
- 238000002844 melting Methods 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 230000008018 melting Effects 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 17
- 238000010304 firing Methods 0.000 description 9
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 8
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 description 6
- 229910021344 molybdenum silicide Inorganic materials 0.000 description 6
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 6
- 229910021342 tungsten silicide Inorganic materials 0.000 description 6
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 230000020169 heat generation Effects 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- PCEXQRKSUSSDFT-UHFFFAOYSA-N [Mn].[Mo] Chemical compound [Mn].[Mo] PCEXQRKSUSSDFT-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000002075 main ingredient Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- MGRWKWACZDFZJT-UHFFFAOYSA-N molybdenum tungsten Chemical compound [Mo].[W] MGRWKWACZDFZJT-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Landscapes
- Resistance Heating (AREA)
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55144598A JPS5767297A (en) | 1980-10-15 | 1980-10-15 | Ceramic heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55144598A JPS5767297A (en) | 1980-10-15 | 1980-10-15 | Ceramic heater |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5767297A JPS5767297A (en) | 1982-04-23 |
| JPS6351356B2 true JPS6351356B2 (de) | 1988-10-13 |
Family
ID=15365767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55144598A Granted JPS5767297A (en) | 1980-10-15 | 1980-10-15 | Ceramic heater |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5767297A (de) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59165395A (ja) * | 1983-03-09 | 1984-09-18 | いすゞ自動車株式会社 | 発熱体 |
| JPS62132754A (ja) * | 1985-12-06 | 1987-06-16 | 株式会社アイジー技術研究所 | セラミツク成形体 |
| JP2534847B2 (ja) * | 1986-07-31 | 1996-09-18 | 京セラ株式会社 | セラミツクヒ−タ |
| JP2538973B2 (ja) * | 1988-03-24 | 1996-10-02 | 日本碍子株式会社 | セラミックヒ―タの製造方法 |
| JP2754814B2 (ja) * | 1989-12-12 | 1998-05-20 | 松下電器産業株式会社 | ヒータ素子 |
| EP0899986B1 (de) * | 1996-05-05 | 2004-11-24 | Tateho Chemical Industries Co., Ltd. | Elektrisches heizelement und mit diesem versehehe spannnvorrichtung |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3914500A (en) * | 1973-09-04 | 1975-10-21 | United Aircraft Corp | Tungsten wire reinforced silicon nitride articles and method for making the same |
| JPS523649A (en) * | 1975-06-25 | 1977-01-12 | Mitsubishi Chem Ind Ltd | Improved method for sealing |
| JPS55126989A (en) * | 1979-03-24 | 1980-10-01 | Kyoto Ceramic | Ceramic heater |
-
1980
- 1980-10-15 JP JP55144598A patent/JPS5767297A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3914500A (en) * | 1973-09-04 | 1975-10-21 | United Aircraft Corp | Tungsten wire reinforced silicon nitride articles and method for making the same |
| JPS523649A (en) * | 1975-06-25 | 1977-01-12 | Mitsubishi Chem Ind Ltd | Improved method for sealing |
| JPS55126989A (en) * | 1979-03-24 | 1980-10-01 | Kyoto Ceramic | Ceramic heater |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5767297A (en) | 1982-04-23 |
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