JPS6349218A - 空気清浄装置 - Google Patents

空気清浄装置

Info

Publication number
JPS6349218A
JPS6349218A JP19198286A JP19198286A JPS6349218A JP S6349218 A JPS6349218 A JP S6349218A JP 19198286 A JP19198286 A JP 19198286A JP 19198286 A JP19198286 A JP 19198286A JP S6349218 A JPS6349218 A JP S6349218A
Authority
JP
Japan
Prior art keywords
air
clean
fan
section
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19198286A
Other languages
English (en)
Japanese (ja)
Other versions
JPH022605B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Fumio Kimura
文夫 木村
Kazuyoshi Nishiyama
西山　一良
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinryo Air Conditioning Co Ltd
Original Assignee
Shinryo Air Conditioning Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinryo Air Conditioning Co Ltd filed Critical Shinryo Air Conditioning Co Ltd
Priority to JP19198286A priority Critical patent/JPS6349218A/ja
Publication of JPS6349218A publication Critical patent/JPS6349218A/ja
Publication of JPH022605B2 publication Critical patent/JPH022605B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Filtering Of Dispersed Particles In Gases (AREA)
JP19198286A 1986-08-19 1986-08-19 空気清浄装置 Granted JPS6349218A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19198286A JPS6349218A (ja) 1986-08-19 1986-08-19 空気清浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19198286A JPS6349218A (ja) 1986-08-19 1986-08-19 空気清浄装置

Publications (2)

Publication Number Publication Date
JPS6349218A true JPS6349218A (ja) 1988-03-02
JPH022605B2 JPH022605B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-01-18

Family

ID=16283664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19198286A Granted JPS6349218A (ja) 1986-08-19 1986-08-19 空気清浄装置

Country Status (1)

Country Link
JP (1) JPS6349218A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07135165A (ja) * 1993-11-11 1995-05-23 Nikon Corp 走査型露光装置
US5486896A (en) * 1993-02-19 1996-01-23 Nikon Corporation Exposure apparatus
US6213607B1 (en) 1994-02-14 2001-04-10 Nikon Corporation Exposure apparatus and field stop thereof
JP2013188707A (ja) * 2012-03-14 2013-09-26 Taisei Corp ファンフィルタユニット

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5486896A (en) * 1993-02-19 1996-01-23 Nikon Corporation Exposure apparatus
JPH07135165A (ja) * 1993-11-11 1995-05-23 Nikon Corp 走査型露光装置
US6213607B1 (en) 1994-02-14 2001-04-10 Nikon Corporation Exposure apparatus and field stop thereof
US6325516B1 (en) 1994-02-14 2001-12-04 Nippon Kogaku Kk Exposure apparatus and field stop thereof
JP2013188707A (ja) * 2012-03-14 2013-09-26 Taisei Corp ファンフィルタユニット

Also Published As

Publication number Publication date
JPH022605B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-01-18

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