JPS6348576B2 - - Google Patents

Info

Publication number
JPS6348576B2
JPS6348576B2 JP61235970A JP23597086A JPS6348576B2 JP S6348576 B2 JPS6348576 B2 JP S6348576B2 JP 61235970 A JP61235970 A JP 61235970A JP 23597086 A JP23597086 A JP 23597086A JP S6348576 B2 JPS6348576 B2 JP S6348576B2
Authority
JP
Japan
Prior art keywords
halogen
ccl
treatment layer
waste gas
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61235970A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6391129A (ja
Inventor
Takao Yagi
Chitoshi Nogami
Kunihiko Koike
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Iwatani Corp
Original Assignee
Iwatani Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iwatani Corp filed Critical Iwatani Corp
Priority to JP61235970A priority Critical patent/JPS6391129A/ja
Publication of JPS6391129A publication Critical patent/JPS6391129A/ja
Publication of JPS6348576B2 publication Critical patent/JPS6348576B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
  • Gas Separation By Absorption (AREA)
JP61235970A 1986-10-02 1986-10-02 ＣＣｌ↓４を含むハロゲン系廃ガスの処理装置 Granted JPS6391129A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61235970A JPS6391129A (ja) 1986-10-02 1986-10-02 ＣＣｌ↓４を含むハロゲン系廃ガスの処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61235970A JPS6391129A (ja) 1986-10-02 1986-10-02 ＣＣｌ↓４を含むハロゲン系廃ガスの処理装置

Publications (2)

Publication Number Publication Date
JPS6391129A JPS6391129A (ja) 1988-04-21
JPS6348576B2 true JPS6348576B2 (enExample) 1988-09-29

Family

ID=16993905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61235970A Granted JPS6391129A (ja) 1986-10-02 1986-10-02 ＣＣｌ↓４を含むハロゲン系廃ガスの処理装置

Country Status (1)

Country Link
JP (1) JPS6391129A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6060034A (en) * 1998-06-02 2000-05-09 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Abatement system for ClF3 containing exhaust gases

Also Published As

Publication number Publication date
JPS6391129A (ja) 1988-04-21

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