JPS6347037A - 基板加工機における基板交換装置 - Google Patents
基板加工機における基板交換装置Info
- Publication number
- JPS6347037A JPS6347037A JP18681586A JP18681586A JPS6347037A JP S6347037 A JPS6347037 A JP S6347037A JP 18681586 A JP18681586 A JP 18681586A JP 18681586 A JP18681586 A JP 18681586A JP S6347037 A JPS6347037 A JP S6347037A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- processing machine
- transfer
- guide
- cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 79
- 238000003754 machining Methods 0.000 abstract description 2
- 210000000078 claw Anatomy 0.000 description 20
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Feeding Of Workpieces (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18681586A JPS6347037A (ja) | 1986-08-11 | 1986-08-11 | 基板加工機における基板交換装置 |
| CH3038/87A CH674817A5 (enExample) | 1986-08-11 | 1987-08-07 | |
| US07/083,279 US4867297A (en) | 1986-08-11 | 1987-08-10 | Board exchanging apparatus |
| DE19873726726 DE3726726A1 (de) | 1986-08-11 | 1987-08-11 | Leiterplatten-wechselvorrichtung |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18681586A JPS6347037A (ja) | 1986-08-11 | 1986-08-11 | 基板加工機における基板交換装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6347037A true JPS6347037A (ja) | 1988-02-27 |
| JPH0314579B2 JPH0314579B2 (enExample) | 1991-02-27 |
Family
ID=16195078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18681586A Granted JPS6347037A (ja) | 1986-08-11 | 1986-08-11 | 基板加工機における基板交換装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6347037A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5220715A (en) * | 1990-05-23 | 1993-06-22 | Hitachi Seiko, Ltd. | Printed circuit board processing apparatus |
-
1986
- 1986-08-11 JP JP18681586A patent/JPS6347037A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5220715A (en) * | 1990-05-23 | 1993-06-22 | Hitachi Seiko, Ltd. | Printed circuit board processing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0314579B2 (enExample) | 1991-02-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |