JPS6346717Y2 - - Google Patents

Info

Publication number
JPS6346717Y2
JPS6346717Y2 JP1983119648U JP11964883U JPS6346717Y2 JP S6346717 Y2 JPS6346717 Y2 JP S6346717Y2 JP 1983119648 U JP1983119648 U JP 1983119648U JP 11964883 U JP11964883 U JP 11964883U JP S6346717 Y2 JPS6346717 Y2 JP S6346717Y2
Authority
JP
Japan
Prior art keywords
casing
mounting flange
main body
intake port
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983119648U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6028298U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1983119648U priority Critical patent/JPS6028298U/ja
Publication of JPS6028298U publication Critical patent/JPS6028298U/ja
Application granted granted Critical
Publication of JPS6346717Y2 publication Critical patent/JPS6346717Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP1983119648U 1983-07-30 1983-07-30 タ−ボ分子ポンプ Granted JPS6028298U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983119648U JPS6028298U (ja) 1983-07-30 1983-07-30 タ−ボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983119648U JPS6028298U (ja) 1983-07-30 1983-07-30 タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS6028298U JPS6028298U (ja) 1985-02-26
JPS6346717Y2 true JPS6346717Y2 (cs) 1988-12-02

Family

ID=30274509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983119648U Granted JPS6028298U (ja) 1983-07-30 1983-07-30 タ−ボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPS6028298U (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017014022A1 (ja) * 2015-07-23 2017-01-26 エドワーズ株式会社 排気システム

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2885337B2 (ja) * 1995-12-18 1999-04-19 丸紅マシナリー株式会社 金属製集合納骨仏壇
DE10001509A1 (de) * 2000-01-15 2001-07-19 Leybold Vakuum Gmbh Vakuumpumpe mit Schwingungsdämpfer
DE60304870T2 (de) * 2003-11-18 2006-11-30 Varian S.P.A., Leini Vakuumpumpe mit Schwingungsdämpfer
JP6009193B2 (ja) * 2012-03-30 2016-10-19 株式会社荏原製作所 真空排気装置
US11905968B2 (en) * 2019-03-26 2024-02-20 Edwards Japan Limited Vacuum pump, casing, and inlet port flange
JP7378697B2 (ja) * 2019-03-26 2023-11-14 エドワーズ株式会社 真空ポンプ
JP7766998B2 (ja) * 2020-03-31 2025-11-11 エドワーズ株式会社 真空ポンプ
EP4269804B1 (de) * 2023-08-14 2025-10-29 Pfeiffer Vacuum Technology AG Vakuumpumpe

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017014022A1 (ja) * 2015-07-23 2017-01-26 エドワーズ株式会社 排気システム
JP2017025793A (ja) * 2015-07-23 2017-02-02 エドワーズ株式会社 排気システム

Also Published As

Publication number Publication date
JPS6028298U (ja) 1985-02-26

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