JPS6344463Y2 - - Google Patents

Info

Publication number
JPS6344463Y2
JPS6344463Y2 JP1983017564U JP1756483U JPS6344463Y2 JP S6344463 Y2 JPS6344463 Y2 JP S6344463Y2 JP 1983017564 U JP1983017564 U JP 1983017564U JP 1756483 U JP1756483 U JP 1756483U JP S6344463 Y2 JPS6344463 Y2 JP S6344463Y2
Authority
JP
Japan
Prior art keywords
graphite
thin film
graphite heating
exchange
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983017564U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59125976U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1756483U priority Critical patent/JPS59125976U/ja
Publication of JPS59125976U publication Critical patent/JPS59125976U/ja
Application granted granted Critical
Publication of JPS6344463Y2 publication Critical patent/JPS6344463Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • General Induction Heating (AREA)
  • Constitution Of High-Frequency Heating (AREA)
JP1756483U 1983-02-10 1983-02-10 薄膜成長装置用グラファイト加熱台 Granted JPS59125976U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1756483U JPS59125976U (ja) 1983-02-10 1983-02-10 薄膜成長装置用グラファイト加熱台

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1756483U JPS59125976U (ja) 1983-02-10 1983-02-10 薄膜成長装置用グラファイト加熱台

Publications (2)

Publication Number Publication Date
JPS59125976U JPS59125976U (ja) 1984-08-24
JPS6344463Y2 true JPS6344463Y2 (OSRAM) 1988-11-18

Family

ID=30148797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1756483U Granted JPS59125976U (ja) 1983-02-10 1983-02-10 薄膜成長装置用グラファイト加熱台

Country Status (1)

Country Link
JP (1) JPS59125976U (OSRAM)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4424426Y1 (OSRAM) * 1967-07-20 1969-10-15
JPS5431472A (en) * 1977-08-15 1979-03-08 Matsushita Electric Works Ltd Molding of embossed product

Also Published As

Publication number Publication date
JPS59125976U (ja) 1984-08-24

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