JPS634346B2 - - Google Patents

Info

Publication number
JPS634346B2
JPS634346B2 JP54125401A JP12540179A JPS634346B2 JP S634346 B2 JPS634346 B2 JP S634346B2 JP 54125401 A JP54125401 A JP 54125401A JP 12540179 A JP12540179 A JP 12540179A JP S634346 B2 JPS634346 B2 JP S634346B2
Authority
JP
Japan
Prior art keywords
insulating film
laser light
thickness
ion implantation
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54125401A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5650511A (en
Inventor
Masanobu Myao
Hiroshi Tamura
Masao Tamura
Osamu Ookura
Nobuyoshi Kashu
Takashi Tokuyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12540179A priority Critical patent/JPS5650511A/ja
Publication of JPS5650511A publication Critical patent/JPS5650511A/ja
Publication of JPS634346B2 publication Critical patent/JPS634346B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P34/42—

Landscapes

  • Recrystallisation Techniques (AREA)
  • Formation Of Insulating Films (AREA)
JP12540179A 1979-10-01 1979-10-01 Manufacture of semiconductor device Granted JPS5650511A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12540179A JPS5650511A (en) 1979-10-01 1979-10-01 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12540179A JPS5650511A (en) 1979-10-01 1979-10-01 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5650511A JPS5650511A (en) 1981-05-07
JPS634346B2 true JPS634346B2 (OSRAM) 1988-01-28

Family

ID=14909211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12540179A Granted JPS5650511A (en) 1979-10-01 1979-10-01 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5650511A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5595484U (OSRAM) * 1979-12-27 1980-07-02

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5546503A (en) * 1978-09-28 1980-04-01 Toshiba Corp Method of making semiconductor device

Also Published As

Publication number Publication date
JPS5650511A (en) 1981-05-07

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