JPS6343427U - - Google Patents
Info
- Publication number
- JPS6343427U JPS6343427U JP13501686U JP13501686U JPS6343427U JP S6343427 U JPS6343427 U JP S6343427U JP 13501686 U JP13501686 U JP 13501686U JP 13501686 U JP13501686 U JP 13501686U JP S6343427 U JPS6343427 U JP S6343427U
- Authority
- JP
- Japan
- Prior art keywords
- rotary chuck
- rotates
- spindle
- spin motor
- support mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 1
Description
第１図は本考案に係る半導体製造装置の断面図
、第２図は従来の半導体製造装置の断面図である
。 １……ウエーハ、１０……回転チヤツク、１１
……支軸、１２……スピンモータ、１３……支持
機構、１４……支持腕、１６……揺動機構、１７
……駆動モータ、１９……円盤。
、第２図は従来の半導体製造装置の断面図である
。 １……ウエーハ、１０……回転チヤツク、１１
……支軸、１２……スピンモータ、１３……支持
機構、１４……支持腕、１６……揺動機構、１７
……駆動モータ、１９……円盤。
Claims (1)
- 半導体ウエーハを吸着保持する回転チヤツクと
、回転チヤツクを囲繞する回収槽と、回転チヤツ
クの支軸を回転させるスピンモータと、スピンモ
ータを揺動可能に支持する支持機構と、回転チヤ
ツクの支軸を揺動回転させる揺動機構とで構成し
たことを特徴とする半導体製造装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13501686U JPS6343427U (ja) | 1986-09-02 | 1986-09-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13501686U JPS6343427U (ja) | 1986-09-02 | 1986-09-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6343427U true JPS6343427U (ja) | 1988-03-23 |
Family
ID=31036797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13501686U Pending JPS6343427U (ja) | 1986-09-02 | 1986-09-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6343427U (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0294387U (ja) * | 1989-01-12 | 1990-07-26 | ||
| JPH04124402A (ja) * | 1990-09-14 | 1992-04-24 | Mitsubishi Heavy Ind Ltd | スクロール型流体機械 |
-
1986
- 1986-09-02 JP JP13501686U patent/JPS6343427U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0294387U (ja) * | 1989-01-12 | 1990-07-26 | ||
| JPH0541274Y2 (ja) * | 1989-01-12 | 1993-10-19 | ||
| JPH04124402A (ja) * | 1990-09-14 | 1992-04-24 | Mitsubishi Heavy Ind Ltd | スクロール型流体機械 |