JPS6342135Y2 - - Google Patents
Info
- Publication number
- JPS6342135Y2 JPS6342135Y2 JP1984162335U JP16233584U JPS6342135Y2 JP S6342135 Y2 JPS6342135 Y2 JP S6342135Y2 JP 1984162335 U JP1984162335 U JP 1984162335U JP 16233584 U JP16233584 U JP 16233584U JP S6342135 Y2 JPS6342135 Y2 JP S6342135Y2
- Authority
- JP
- Japan
- Prior art keywords
- protective cover
- crucible
- vapor deposition
- insulating member
- deposition material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000001681 protective effect Effects 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 19
- 239000004020 conductor Substances 0.000 claims description 14
- 238000007740 vapor deposition Methods 0.000 claims description 12
- 238000007738 vacuum evaporation Methods 0.000 claims description 11
- 230000008021 deposition Effects 0.000 claims description 10
- 239000000126 substance Substances 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 description 5
- 230000015556 catabolic process Effects 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000005219 brazing Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984162335U JPS6342135Y2 (es) | 1984-10-29 | 1984-10-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984162335U JPS6342135Y2 (es) | 1984-10-29 | 1984-10-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6178862U JPS6178862U (es) | 1986-05-26 |
| JPS6342135Y2 true JPS6342135Y2 (es) | 1988-11-04 |
Family
ID=30720222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984162335U Expired JPS6342135Y2 (es) | 1984-10-29 | 1984-10-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6342135Y2 (es) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52100052U (es) * | 1976-01-26 | 1977-07-28 |
-
1984
- 1984-10-29 JP JP1984162335U patent/JPS6342135Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6178862U (es) | 1986-05-26 |
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