JPS6453751U - - Google Patents
Info
- Publication number
- JPS6453751U JPS6453751U JP14884887U JP14884887U JPS6453751U JP S6453751 U JPS6453751 U JP S6453751U JP 14884887 U JP14884887 U JP 14884887U JP 14884887 U JP14884887 U JP 14884887U JP S6453751 U JPS6453751 U JP S6453751U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- vapor deposition
- sample
- electrical energy
- functional parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims 4
- 230000005684 electric field Effects 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 230000001133 acceleration Effects 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14884887U JPS6453751U (es) | 1987-09-29 | 1987-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14884887U JPS6453751U (es) | 1987-09-29 | 1987-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6453751U true JPS6453751U (es) | 1989-04-03 |
Family
ID=31420539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14884887U Pending JPS6453751U (es) | 1987-09-29 | 1987-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6453751U (es) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60162773A (ja) * | 1984-01-31 | 1985-08-24 | Futaba Corp | イオンビ−ム蒸着装置 |
-
1987
- 1987-09-29 JP JP14884887U patent/JPS6453751U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60162773A (ja) * | 1984-01-31 | 1985-08-24 | Futaba Corp | イオンビ−ム蒸着装置 |
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