JPS634212Y2 - - Google Patents
Info
- Publication number
- JPS634212Y2 JPS634212Y2 JP14225983U JP14225983U JPS634212Y2 JP S634212 Y2 JPS634212 Y2 JP S634212Y2 JP 14225983 U JP14225983 U JP 14225983U JP 14225983 U JP14225983 U JP 14225983U JP S634212 Y2 JPS634212 Y2 JP S634212Y2
- Authority
- JP
- Japan
- Prior art keywords
- port
- rubber sheet
- stage glass
- pressure reducing
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011521 glass Substances 0.000 claims description 28
- 239000000463 material Substances 0.000 claims description 18
- 238000007789 sealing Methods 0.000 claims 1
- 230000006837 decompression Effects 0.000 description 15
- 238000004804 winding Methods 0.000 description 8
- 230000008602 contraction Effects 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Materials For Photolithography (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14225983U JPS6051542U (ja) | 1983-09-16 | 1983-09-16 | 感光材焼付装置における真空密着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14225983U JPS6051542U (ja) | 1983-09-16 | 1983-09-16 | 感光材焼付装置における真空密着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6051542U JPS6051542U (ja) | 1985-04-11 |
| JPS634212Y2 true JPS634212Y2 (fr) | 1988-02-02 |
Family
ID=30317926
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14225983U Granted JPS6051542U (ja) | 1983-09-16 | 1983-09-16 | 感光材焼付装置における真空密着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6051542U (fr) |
-
1983
- 1983-09-16 JP JP14225983U patent/JPS6051542U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6051542U (ja) | 1985-04-11 |
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