JPS6341228B2 - - Google Patents

Info

Publication number
JPS6341228B2
JPS6341228B2 JP55008543A JP854380A JPS6341228B2 JP S6341228 B2 JPS6341228 B2 JP S6341228B2 JP 55008543 A JP55008543 A JP 55008543A JP 854380 A JP854380 A JP 854380A JP S6341228 B2 JPS6341228 B2 JP S6341228B2
Authority
JP
Japan
Prior art keywords
mask
mesa
oxide film
etching
silicon substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55008543A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56105669A (en
Inventor
Toshihiko Aimi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP854380A priority Critical patent/JPS56105669A/ja
Publication of JPS56105669A publication Critical patent/JPS56105669A/ja
Publication of JPS6341228B2 publication Critical patent/JPS6341228B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P54/00—

Landscapes

  • Bipolar Transistors (AREA)
  • Thyristors (AREA)
  • Weting (AREA)
JP854380A 1980-01-28 1980-01-28 Manufacture of mesa type semiconductor pellet Granted JPS56105669A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP854380A JPS56105669A (en) 1980-01-28 1980-01-28 Manufacture of mesa type semiconductor pellet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP854380A JPS56105669A (en) 1980-01-28 1980-01-28 Manufacture of mesa type semiconductor pellet

Publications (2)

Publication Number Publication Date
JPS56105669A JPS56105669A (en) 1981-08-22
JPS6341228B2 true JPS6341228B2 (enExample) 1988-08-16

Family

ID=11696051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP854380A Granted JPS56105669A (en) 1980-01-28 1980-01-28 Manufacture of mesa type semiconductor pellet

Country Status (1)

Country Link
JP (1) JPS56105669A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04295217A (ja) * 1990-12-17 1992-10-20 Heidelberger Druckmas Ag ケーブル引入れ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04295217A (ja) * 1990-12-17 1992-10-20 Heidelberger Druckmas Ag ケーブル引入れ装置

Also Published As

Publication number Publication date
JPS56105669A (en) 1981-08-22

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