JPS6340745Y2 - - Google Patents
Info
- Publication number
- JPS6340745Y2 JPS6340745Y2 JP16783583U JP16783583U JPS6340745Y2 JP S6340745 Y2 JPS6340745 Y2 JP S6340745Y2 JP 16783583 U JP16783583 U JP 16783583U JP 16783583 U JP16783583 U JP 16783583U JP S6340745 Y2 JPS6340745 Y2 JP S6340745Y2
- Authority
- JP
- Japan
- Prior art keywords
- air
- water
- chamber
- wall
- space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 38
- 238000005086 pumping Methods 0.000 claims 1
- 239000000428 dust Substances 0.000 description 7
- 239000012530 fluid Substances 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
Landscapes
- Ventilation (AREA)
- Separation Of Particles Using Liquids (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16783583U JPS6075837U (ja) | 1983-10-28 | 1983-10-28 | クリ−ンドラフトチヤンバ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16783583U JPS6075837U (ja) | 1983-10-28 | 1983-10-28 | クリ−ンドラフトチヤンバ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6075837U JPS6075837U (ja) | 1985-05-28 |
| JPS6340745Y2 true JPS6340745Y2 (pt) | 1988-10-25 |
Family
ID=30367085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16783583U Granted JPS6075837U (ja) | 1983-10-28 | 1983-10-28 | クリ−ンドラフトチヤンバ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6075837U (pt) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6433872B2 (ja) * | 2015-09-14 | 2018-12-05 | 東芝メモリ株式会社 | 集塵装置及び集塵システム |
-
1983
- 1983-10-28 JP JP16783583U patent/JPS6075837U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6075837U (ja) | 1985-05-28 |
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