JPS6339667B2 - - Google Patents

Info

Publication number
JPS6339667B2
JPS6339667B2 JP59015731A JP1573184A JPS6339667B2 JP S6339667 B2 JPS6339667 B2 JP S6339667B2 JP 59015731 A JP59015731 A JP 59015731A JP 1573184 A JP1573184 A JP 1573184A JP S6339667 B2 JPS6339667 B2 JP S6339667B2
Authority
JP
Japan
Prior art keywords
ionized
substrate
voltage
vaporized substance
ionization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59015731A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60162773A (ja
Inventor
Kyoshi Morimoto
Toshinori Takagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Futaba Corp
Original Assignee
Futaba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Futaba Corp filed Critical Futaba Corp
Priority to JP1573184A priority Critical patent/JPS60162773A/ja
Priority to DE19853502902 priority patent/DE3502902A1/de
Priority to US06/696,518 priority patent/US4559901A/en
Priority to GB08502400A priority patent/GB2156578B/en
Publication of JPS60162773A publication Critical patent/JPS60162773A/ja
Publication of JPS6339667B2 publication Critical patent/JPS6339667B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/221—Ion beam deposition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP1573184A 1984-01-31 1984-01-31 イオンビ−ム蒸着装置 Granted JPS60162773A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1573184A JPS60162773A (ja) 1984-01-31 1984-01-31 イオンビ−ム蒸着装置
DE19853502902 DE3502902A1 (de) 1984-01-31 1985-01-29 Ionenstrahl-aufdampfvorrichtung
US06/696,518 US4559901A (en) 1984-01-31 1985-01-30 Ion beam deposition apparatus
GB08502400A GB2156578B (en) 1984-01-31 1985-01-31 Vapour deposition apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1573184A JPS60162773A (ja) 1984-01-31 1984-01-31 イオンビ−ム蒸着装置

Publications (2)

Publication Number Publication Date
JPS60162773A JPS60162773A (ja) 1985-08-24
JPS6339667B2 true JPS6339667B2 (enrdf_load_stackoverflow) 1988-08-05

Family

ID=11896907

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1573184A Granted JPS60162773A (ja) 1984-01-31 1984-01-31 イオンビ−ム蒸着装置

Country Status (1)

Country Link
JP (1) JPS60162773A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6453751U (enrdf_load_stackoverflow) * 1987-09-29 1989-04-03

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5614498A (en) * 1979-07-12 1981-02-12 Sekisui Chem Co Ltd Manufacture of transparent electrically conductive thin film
JPS5668932A (en) * 1979-11-07 1981-06-09 Sekisui Chem Co Ltd Manufacture of magnetic recording medium

Also Published As

Publication number Publication date
JPS60162773A (ja) 1985-08-24

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees