JPS6338427B2 - - Google Patents

Info

Publication number
JPS6338427B2
JPS6338427B2 JP59049267A JP4926784A JPS6338427B2 JP S6338427 B2 JPS6338427 B2 JP S6338427B2 JP 59049267 A JP59049267 A JP 59049267A JP 4926784 A JP4926784 A JP 4926784A JP S6338427 B2 JPS6338427 B2 JP S6338427B2
Authority
JP
Japan
Prior art keywords
rotating body
laser beam
base material
boron nitride
irradiated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59049267A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60194066A (ja
Inventor
Yukie Mineta
Nobuo Yasunaga
Noboru Tarumi
Akira Obara
Masayuki Ikeda
Junichi Sato
Kunio Shibuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Sumitomo Heavy Industries Ltd
Resonac Holdings Corp
Original Assignee
Agency of Industrial Science and Technology
Showa Denko KK
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Showa Denko KK, Sumitomo Heavy Industries Ltd filed Critical Agency of Industrial Science and Technology
Priority to JP4926784A priority Critical patent/JPS60194066A/ja
Publication of JPS60194066A publication Critical patent/JPS60194066A/ja
Publication of JPS6338427B2 publication Critical patent/JPS6338427B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP4926784A 1984-03-16 1984-03-16 硬質膜被覆材料の製造方法 Granted JPS60194066A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4926784A JPS60194066A (ja) 1984-03-16 1984-03-16 硬質膜被覆材料の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4926784A JPS60194066A (ja) 1984-03-16 1984-03-16 硬質膜被覆材料の製造方法

Publications (2)

Publication Number Publication Date
JPS60194066A JPS60194066A (ja) 1985-10-02
JPS6338427B2 true JPS6338427B2 (enExample) 1988-07-29

Family

ID=12826054

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4926784A Granted JPS60194066A (ja) 1984-03-16 1984-03-16 硬質膜被覆材料の製造方法

Country Status (1)

Country Link
JP (1) JPS60194066A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005019103A1 (ja) * 2003-08-20 2005-03-03 Nec Corporation ナノカーボン製造装置およびナノカーボンの製造方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63227766A (ja) * 1986-10-27 1988-09-22 Hitachi Ltd 超微粒子膜の形成方法
JPH05330806A (ja) * 1992-05-26 1993-12-14 Sumitomo Electric Ind Ltd 立方晶窒化ホウ素の加工方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57158377A (en) * 1981-03-27 1982-09-30 Ishikawajima Harima Heavy Ind Co Ltd Plating device for inside surface of pipe utilizing laser beam

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005019103A1 (ja) * 2003-08-20 2005-03-03 Nec Corporation ナノカーボン製造装置およびナノカーボンの製造方法

Also Published As

Publication number Publication date
JPS60194066A (ja) 1985-10-02

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term