JPS60194066A - 硬質膜被覆材料の製造方法 - Google Patents

硬質膜被覆材料の製造方法

Info

Publication number
JPS60194066A
JPS60194066A JP4926784A JP4926784A JPS60194066A JP S60194066 A JPS60194066 A JP S60194066A JP 4926784 A JP4926784 A JP 4926784A JP 4926784 A JP4926784 A JP 4926784A JP S60194066 A JPS60194066 A JP S60194066A
Authority
JP
Japan
Prior art keywords
rotating body
laser beam
base material
hard film
boron nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4926784A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6338427B2 (enExample
Inventor
Nobushige Mineta
峰田　進栄
Nobuo Yasunaga
安永　暢男
Noboru Tarumi
樽見　昇
Akira Obara
明 小原
Masayuki Ikeda
正幸 池田
Junichi Sato
純一 佐藤
Kunio Shibuki
渋木　邦夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Tungaloy Corp
Resonac Holdings Corp
Original Assignee
Agency of Industrial Science and Technology
Showa Denko KK
Toshiba Tungaloy Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Showa Denko KK, Toshiba Tungaloy Co Ltd filed Critical Agency of Industrial Science and Technology
Priority to JP4926784A priority Critical patent/JPS60194066A/ja
Publication of JPS60194066A publication Critical patent/JPS60194066A/ja
Publication of JPS6338427B2 publication Critical patent/JPS6338427B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP4926784A 1984-03-16 1984-03-16 硬質膜被覆材料の製造方法 Granted JPS60194066A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4926784A JPS60194066A (ja) 1984-03-16 1984-03-16 硬質膜被覆材料の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4926784A JPS60194066A (ja) 1984-03-16 1984-03-16 硬質膜被覆材料の製造方法

Publications (2)

Publication Number Publication Date
JPS60194066A true JPS60194066A (ja) 1985-10-02
JPS6338427B2 JPS6338427B2 (enExample) 1988-07-29

Family

ID=12826054

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4926784A Granted JPS60194066A (ja) 1984-03-16 1984-03-16 硬質膜被覆材料の製造方法

Country Status (1)

Country Link
JP (1) JPS60194066A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63227766A (ja) * 1986-10-27 1988-09-22 Hitachi Ltd 超微粒子膜の形成方法
US5450434A (en) * 1992-05-26 1995-09-12 Sumitomo Electric Industries, Ltd. Method to work cubic boron nitride article

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060191781A1 (en) * 2003-08-20 2006-08-31 Takeshi Azami Apparatus and method for manufacturing nono carbon

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57158377A (en) * 1981-03-27 1982-09-30 Ishikawajima Harima Heavy Ind Co Ltd Plating device for inside surface of pipe utilizing laser beam

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57158377A (en) * 1981-03-27 1982-09-30 Ishikawajima Harima Heavy Ind Co Ltd Plating device for inside surface of pipe utilizing laser beam

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63227766A (ja) * 1986-10-27 1988-09-22 Hitachi Ltd 超微粒子膜の形成方法
US5450434A (en) * 1992-05-26 1995-09-12 Sumitomo Electric Industries, Ltd. Method to work cubic boron nitride article

Also Published As

Publication number Publication date
JPS6338427B2 (enExample) 1988-07-29

Similar Documents

Publication Publication Date Title
Voevodin et al. Nanocrystalline WC and WC/a-C composite coatings produced from intersected plasma fluxes at low deposition temperatures
JP5237124B2 (ja) 窒化炭素を用いたコーティングおよび窒化炭素をコーティングした製品
US5620754A (en) Method of treating and coating substrates
US5731046A (en) Fabrication of diamond and diamond-like carbon coatings
US6274206B1 (en) Method of coating a silicon or silicide substrate
EP0474369B1 (en) Diamond-like carbon coatings
JP3448884B2 (ja) 人工ダイヤモンド被覆材
JP2005526905A (ja) 鉄ベース基材上にダイヤモンド被膜を形成する方法およびｃｖｄダイヤモンド被膜を施すためのかかる鉄ベース基材の使用。
JPS6338427B2 (enExample)
JPS6338428B2 (enExample)
JPS61195971A (ja) 耐摩耗性皮膜の形成方法
US5001001A (en) Process for the fabrication of ceramic monoliths by laser-assisted chemical vapor infiltration
JP4701386B2 (ja) 高硬度材料
JP4133150B2 (ja) ダイヤモンド膜被覆部材の製造方法
Novikov et al. Superhard iC coatings used in complex processes of surface strengthening of tools and machine parts
JP5232942B2 (ja) 切削工具の表面処理方法
RU2092610C1 (ru) Способ получения аморфных покрытий
JP2004211136A (ja) 密着性に優れた硬質皮膜およびその製造方法
JP2000129420A (ja) 高温摺動部材用硬質膜
Fenker et al. Deposition of CVD diamond onto ion beam modified ASP 23 cutting tools
JP3787586B2 (ja) 非晶質窒化ホウ素薄膜被覆摺動部材および摺動部材の製造方法
JPH11124665A (ja) 摩擦摺動部材及びその製造方法
JPS62256964A (ja) セラミツクスが被着された部材
Tkachev et al. Structure and Frictional Properties of Ultrahard AlMgB14 Thin Coatings. Nanomaterials 2023, 13, 1589
JPH04120265A (ja) 窒化ホウ素被覆部材

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term