JPS6337511B2 - - Google Patents

Info

Publication number
JPS6337511B2
JPS6337511B2 JP56210866A JP21086681A JPS6337511B2 JP S6337511 B2 JPS6337511 B2 JP S6337511B2 JP 56210866 A JP56210866 A JP 56210866A JP 21086681 A JP21086681 A JP 21086681A JP S6337511 B2 JPS6337511 B2 JP S6337511B2
Authority
JP
Japan
Prior art keywords
gate
layer
slope
semi
semiconductor layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56210866A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58114460A (ja
Inventor
Osamu Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56210866A priority Critical patent/JPS58114460A/ja
Publication of JPS58114460A publication Critical patent/JPS58114460A/ja
Publication of JPS6337511B2 publication Critical patent/JPS6337511B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/80—FETs having rectifying junction gate electrodes
    • H10D30/83—FETs having PN junction gate electrodes

Landscapes

  • Junction Field-Effect Transistors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
JP56210866A 1981-12-28 1981-12-28 半導体装置とその製造方法 Granted JPS58114460A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56210866A JPS58114460A (ja) 1981-12-28 1981-12-28 半導体装置とその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56210866A JPS58114460A (ja) 1981-12-28 1981-12-28 半導体装置とその製造方法

Publications (2)

Publication Number Publication Date
JPS58114460A JPS58114460A (ja) 1983-07-07
JPS6337511B2 true JPS6337511B2 (enExample) 1988-07-26

Family

ID=16596393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56210866A Granted JPS58114460A (ja) 1981-12-28 1981-12-28 半導体装置とその製造方法

Country Status (1)

Country Link
JP (1) JPS58114460A (enExample)

Also Published As

Publication number Publication date
JPS58114460A (ja) 1983-07-07

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