JPS6337504B2 - - Google Patents
Info
- Publication number
- JPS6337504B2 JPS6337504B2 JP15458181A JP15458181A JPS6337504B2 JP S6337504 B2 JPS6337504 B2 JP S6337504B2 JP 15458181 A JP15458181 A JP 15458181A JP 15458181 A JP15458181 A JP 15458181A JP S6337504 B2 JPS6337504 B2 JP S6337504B2
- Authority
- JP
- Japan
- Prior art keywords
- tantalum
- film
- sputtering
- gas
- nitrogen gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Parts Printed On Printed Circuit Boards (AREA)
- Manufacturing Of Printed Wiring (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15458181A JPS5856381A (ja) | 1981-09-29 | 1981-09-29 | マグネトロン・スパツタリング装置によるＴａ↓２Ｎ膜生成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15458181A JPS5856381A (ja) | 1981-09-29 | 1981-09-29 | マグネトロン・スパツタリング装置によるＴａ↓２Ｎ膜生成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5856381A JPS5856381A (ja) | 1983-04-04 |
| JPS6337504B2 true JPS6337504B2 (https=) | 1988-07-26 |
Family
ID=15587334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15458181A Granted JPS5856381A (ja) | 1981-09-29 | 1981-09-29 | マグネトロン・スパツタリング装置によるＴａ↓２Ｎ膜生成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5856381A (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60208346A (ja) * | 1984-03-31 | 1985-10-19 | Kanegafuchi Chem Ind Co Ltd | 透明、耐熱、難燃、耐衝撃性樹脂組成物 |
| JPS6280656A (ja) * | 1985-10-04 | 1987-04-14 | Toppan Printing Co Ltd | フオトマスクブランクおよびフオトマスク |
-
1981
- 1981-09-29 JP JP15458181A patent/JPS5856381A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5856381A (ja) | 1983-04-04 |
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