JPH0473244B2 - - Google Patents
Info
- Publication number
- JPH0473244B2 JPH0473244B2 JP13168285A JP13168285A JPH0473244B2 JP H0473244 B2 JPH0473244 B2 JP H0473244B2 JP 13168285 A JP13168285 A JP 13168285A JP 13168285 A JP13168285 A JP 13168285A JP H0473244 B2 JPH0473244 B2 JP H0473244B2
- Authority
- JP
- Japan
- Prior art keywords
- conductive film
- film
- transparent conductive
- sputtering
- sputter etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
- Liquid Crystal (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13168285A JPS61290605A (ja) | 1985-06-19 | 1985-06-19 | 低抵抗透明導電膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13168285A JPS61290605A (ja) | 1985-06-19 | 1985-06-19 | 低抵抗透明導電膜の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61290605A JPS61290605A (ja) | 1986-12-20 |
| JPH0473244B2 true JPH0473244B2 (https=) | 1992-11-20 |
Family
ID=15063755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13168285A Granted JPS61290605A (ja) | 1985-06-19 | 1985-06-19 | 低抵抗透明導電膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61290605A (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH089767B2 (ja) * | 1987-03-31 | 1996-01-31 | エヌオーケー株式会社 | 低抵抗透明導電膜の製造方法 |
| JP6660940B2 (ja) * | 2015-03-24 | 2020-03-11 | 株式会社カネカ | 透明電極付き基板の製造方法 |
-
1985
- 1985-06-19 JP JP13168285A patent/JPS61290605A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61290605A (ja) | 1986-12-20 |
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