JPH0511374B2 - - Google Patents
Info
- Publication number
- JPH0511374B2 JPH0511374B2 JP13168185A JP13168185A JPH0511374B2 JP H0511374 B2 JPH0511374 B2 JP H0511374B2 JP 13168185 A JP13168185 A JP 13168185A JP 13168185 A JP13168185 A JP 13168185A JP H0511374 B2 JPH0511374 B2 JP H0511374B2
- Authority
- JP
- Japan
- Prior art keywords
- conductive film
- film
- transparent conductive
- sputtering
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 22
- 238000004544 sputter deposition Methods 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 13
- 238000000992 sputter etching Methods 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000004033 plastic Substances 0.000 claims description 4
- 229920003023 plastic Polymers 0.000 claims description 4
- 239000002994 raw material Substances 0.000 claims description 3
- 239000010408 film Substances 0.000 description 43
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Surface Treatment Of Glass (AREA)
- Physical Vapour Deposition (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
- Liquid Crystal (AREA)
- Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13168185A JPS61290607A (ja) | 1985-06-19 | 1985-06-19 | 透明導電膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13168185A JPS61290607A (ja) | 1985-06-19 | 1985-06-19 | 透明導電膜の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61290607A JPS61290607A (ja) | 1986-12-20 |
| JPH0511374B2 true JPH0511374B2 (https=) | 1993-02-15 |
Family
ID=15063731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13168185A Granted JPS61290607A (ja) | 1985-06-19 | 1985-06-19 | 透明導電膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61290607A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6660940B2 (ja) * | 2015-03-24 | 2020-03-11 | 株式会社カネカ | 透明電極付き基板の製造方法 |
-
1985
- 1985-06-19 JP JP13168185A patent/JPS61290607A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61290607A (ja) | 1986-12-20 |
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