JPS61290607A - 透明導電膜の製造方法 - Google Patents

透明導電膜の製造方法

Info

Publication number
JPS61290607A
JPS61290607A JP13168185A JP13168185A JPS61290607A JP S61290607 A JPS61290607 A JP S61290607A JP 13168185 A JP13168185 A JP 13168185A JP 13168185 A JP13168185 A JP 13168185A JP S61290607 A JPS61290607 A JP S61290607A
Authority
JP
Japan
Prior art keywords
conductive film
film
transparent conductive
sputtering
insulating substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13168185A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0511374B2 (https=
Inventor
和行 尾崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nok Corp
Original Assignee
Nok Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nok Corp filed Critical Nok Corp
Priority to JP13168185A priority Critical patent/JPS61290607A/ja
Publication of JPS61290607A publication Critical patent/JPS61290607A/ja
Publication of JPH0511374B2 publication Critical patent/JPH0511374B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Non-Insulated Conductors (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Liquid Crystal (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
JP13168185A 1985-06-19 1985-06-19 透明導電膜の製造方法 Granted JPS61290607A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13168185A JPS61290607A (ja) 1985-06-19 1985-06-19 透明導電膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13168185A JPS61290607A (ja) 1985-06-19 1985-06-19 透明導電膜の製造方法

Publications (2)

Publication Number Publication Date
JPS61290607A true JPS61290607A (ja) 1986-12-20
JPH0511374B2 JPH0511374B2 (https=) 1993-02-15

Family

ID=15063731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13168185A Granted JPS61290607A (ja) 1985-06-19 1985-06-19 透明導電膜の製造方法

Country Status (1)

Country Link
JP (1) JPS61290607A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016152808A1 (ja) * 2015-03-24 2016-09-29 株式会社カネカ 透明電極付き基板および透明電極付き基板の製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016152808A1 (ja) * 2015-03-24 2016-09-29 株式会社カネカ 透明電極付き基板および透明電極付き基板の製造方法
CN107109639A (zh) * 2015-03-24 2017-08-29 株式会社钟化 带透明电极的基板及带透明电极的基板的制造方法
US10173393B2 (en) 2015-03-24 2019-01-08 Kaneka Corporation Transparent electrode-equipped substrate and method for producing transparent electrode-equipped substrate
CN107109639B (zh) * 2015-03-24 2019-09-10 株式会社钟化 带透明电极的基板及带透明电极的基板的制造方法

Also Published As

Publication number Publication date
JPH0511374B2 (https=) 1993-02-15

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