JPS6336333Y2 - - Google Patents

Info

Publication number
JPS6336333Y2
JPS6336333Y2 JP1980151279U JP15127980U JPS6336333Y2 JP S6336333 Y2 JPS6336333 Y2 JP S6336333Y2 JP 1980151279 U JP1980151279 U JP 1980151279U JP 15127980 U JP15127980 U JP 15127980U JP S6336333 Y2 JPS6336333 Y2 JP S6336333Y2
Authority
JP
Japan
Prior art keywords
substrate
photoresist
film
supply pipe
installation table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980151279U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5774436U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980151279U priority Critical patent/JPS6336333Y2/ja
Publication of JPS5774436U publication Critical patent/JPS5774436U/ja
Application granted granted Critical
Publication of JPS6336333Y2 publication Critical patent/JPS6336333Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1980151279U 1980-10-23 1980-10-23 Expired JPS6336333Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980151279U JPS6336333Y2 (enExample) 1980-10-23 1980-10-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980151279U JPS6336333Y2 (enExample) 1980-10-23 1980-10-23

Publications (2)

Publication Number Publication Date
JPS5774436U JPS5774436U (enExample) 1982-05-08
JPS6336333Y2 true JPS6336333Y2 (enExample) 1988-09-27

Family

ID=29510618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980151279U Expired JPS6336333Y2 (enExample) 1980-10-23 1980-10-23

Country Status (1)

Country Link
JP (1) JPS6336333Y2 (enExample)

Also Published As

Publication number Publication date
JPS5774436U (enExample) 1982-05-08

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