JPS6336333Y2 - - Google Patents
Info
- Publication number
- JPS6336333Y2 JPS6336333Y2 JP15127980U JP15127980U JPS6336333Y2 JP S6336333 Y2 JPS6336333 Y2 JP S6336333Y2 JP 15127980 U JP15127980 U JP 15127980U JP 15127980 U JP15127980 U JP 15127980U JP S6336333 Y2 JPS6336333 Y2 JP S6336333Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- photoresist
- film
- supply pipe
- installation table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 42
- 239000000758 substrate Substances 0.000 claims description 40
- 239000007788 liquid Substances 0.000 claims description 16
- 239000011248 coating agent Substances 0.000 claims description 10
- 238000000576 coating method Methods 0.000 claims description 10
- 238000009434 installation Methods 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims 1
- 239000010408 film Substances 0.000 description 15
- 239000000428 dust Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15127980U JPS6336333Y2 (enExample) | 1980-10-23 | 1980-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15127980U JPS6336333Y2 (enExample) | 1980-10-23 | 1980-10-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5774436U JPS5774436U (enExample) | 1982-05-08 |
| JPS6336333Y2 true JPS6336333Y2 (enExample) | 1988-09-27 |
Family
ID=29510618
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15127980U Expired JPS6336333Y2 (enExample) | 1980-10-23 | 1980-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6336333Y2 (enExample) |
-
1980
- 1980-10-23 JP JP15127980U patent/JPS6336333Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5774436U (enExample) | 1982-05-08 |
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