JPS6332362B2 - - Google Patents
Info
- Publication number
- JPS6332362B2 JPS6332362B2 JP55177475A JP17747580A JPS6332362B2 JP S6332362 B2 JPS6332362 B2 JP S6332362B2 JP 55177475 A JP55177475 A JP 55177475A JP 17747580 A JP17747580 A JP 17747580A JP S6332362 B2 JPS6332362 B2 JP S6332362B2
- Authority
- JP
- Japan
- Prior art keywords
- filter
- transmission filter
- stripe
- refractive index
- green
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005540 biological transmission Effects 0.000 claims description 78
- 239000010410 layer Substances 0.000 claims description 57
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 30
- 239000000463 material Substances 0.000 claims description 17
- 125000006850 spacer group Chemical group 0.000 claims description 17
- 235000012239 silicon dioxide Nutrition 0.000 claims description 15
- 239000000377 silicon dioxide Substances 0.000 claims description 15
- 239000011241 protective layer Substances 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 13
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical group O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 10
- 238000001312 dry etching Methods 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 5
- 239000004408 titanium dioxide Substances 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- 229910001404 rare earth metal oxide Inorganic materials 0.000 claims description 2
- 230000003595 spectral effect Effects 0.000 description 37
- 239000010408 film Substances 0.000 description 31
- 238000000034 method Methods 0.000 description 24
- 238000003384 imaging method Methods 0.000 description 12
- 238000010586 diagram Methods 0.000 description 11
- 239000000853 adhesive Substances 0.000 description 8
- 230000001070 adhesive effect Effects 0.000 description 8
- 238000005530 etching Methods 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000002834 transmittance Methods 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 229910010413 TiO 2 Inorganic materials 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- 238000001444 catalytic combustion detection Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 3
- 150000001786 chalcogen compounds Chemical class 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 108010010803 Gelatin Proteins 0.000 description 1
- 229940007424 antimony trisulfide Drugs 0.000 description 1
- NVWBARWTDVQPJD-UHFFFAOYSA-N antimony(3+);trisulfide Chemical compound [S-2].[S-2].[S-2].[Sb+3].[Sb+3] NVWBARWTDVQPJD-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001017 electron-beam sputter deposition Methods 0.000 description 1
- 229920000159 gelatin Polymers 0.000 description 1
- 239000008273 gelatin Substances 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
- 235000011852 gelatine desserts Nutrition 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 229910000464 lead oxide Inorganic materials 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- HYXGAEYDKFCVMU-UHFFFAOYSA-N scandium oxide Chemical compound O=[Sc]O[Sc]=O HYXGAEYDKFCVMU-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Filters (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Color Television Image Signal Generators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55177475A JPS57100404A (en) | 1980-12-16 | 1980-12-16 | Stripe filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55177475A JPS57100404A (en) | 1980-12-16 | 1980-12-16 | Stripe filter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57100404A JPS57100404A (en) | 1982-06-22 |
| JPS6332362B2 true JPS6332362B2 (fr) | 1988-06-29 |
Family
ID=16031560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55177475A Granted JPS57100404A (en) | 1980-12-16 | 1980-12-16 | Stripe filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57100404A (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005069376A1 (fr) * | 2004-01-15 | 2005-07-28 | Matsushita Electric Industrial Co.,Ltd. | Dispositif d'imagerie a l'etat solide, procede de production dudit dispositif d'imagerie a l'etat solide et camera utilisant ledit dispositif |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59147304A (ja) * | 1983-02-10 | 1984-08-23 | Fuji Photo Optical Co Ltd | 耐環境性干渉膜フイルタ |
| JPS6098404A (ja) * | 1983-11-04 | 1985-06-01 | Akai Electric Co Ltd | ダイクロイツクミラ−の表面保護膜形成方法 |
| JP4806197B2 (ja) * | 2005-01-17 | 2011-11-02 | パナソニック株式会社 | 固体撮像装置 |
| WO2006100903A1 (fr) * | 2005-03-23 | 2006-09-28 | Matsushita Electric Industrial Co., Ltd. | Dispositif d'imagerie embarque |
| JP4836498B2 (ja) * | 2005-06-15 | 2011-12-14 | パナソニック株式会社 | 固体撮像装置及びカメラ |
| JP2007019143A (ja) * | 2005-07-06 | 2007-01-25 | Matsushita Electric Ind Co Ltd | 固体撮像装置の製造方法、固体撮像装置及びカメラ |
| CN101263720B (zh) * | 2005-10-04 | 2010-05-19 | 松下电器产业株式会社 | 车载摄像装置 |
| WO2007094092A1 (fr) * | 2006-02-15 | 2007-08-23 | Matsushita Electric Industrial Co., Ltd. | Dispositif de formation d'image a semi-conducteurs et camera |
| JP2008070437A (ja) * | 2006-09-12 | 2008-03-27 | Matsushita Electric Ind Co Ltd | 干渉フィルタ、液晶ディスプレイ、エレクトロルミネッセンスディスプレイ、プロジェクション表示装置 |
| JP2008170979A (ja) * | 2006-12-13 | 2008-07-24 | Matsushita Electric Ind Co Ltd | 固体撮像装置、その製造方法およびカメラ |
-
1980
- 1980-12-16 JP JP55177475A patent/JPS57100404A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005069376A1 (fr) * | 2004-01-15 | 2005-07-28 | Matsushita Electric Industrial Co.,Ltd. | Dispositif d'imagerie a l'etat solide, procede de production dudit dispositif d'imagerie a l'etat solide et camera utilisant ledit dispositif |
| JPWO2005069376A1 (ja) * | 2004-01-15 | 2007-07-26 | 松下電器産業株式会社 | 固体撮像装置、固体撮像装置の製造方法及びこれを用いたカメラ |
| JP4638356B2 (ja) * | 2004-01-15 | 2011-02-23 | パナソニック株式会社 | 固体撮像装置、固体撮像装置の製造方法及びこれを用いたカメラ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57100404A (en) | 1982-06-22 |
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