JPS6331939B2 - - Google Patents

Info

Publication number
JPS6331939B2
JPS6331939B2 JP59028518A JP2851884A JPS6331939B2 JP S6331939 B2 JPS6331939 B2 JP S6331939B2 JP 59028518 A JP59028518 A JP 59028518A JP 2851884 A JP2851884 A JP 2851884A JP S6331939 B2 JPS6331939 B2 JP S6331939B2
Authority
JP
Japan
Prior art keywords
layer
polyamic acid
formula
wiring structure
acid composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59028518A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60121740A (ja
Inventor
Kazunari Takemoto
Fumio Kataoka
Fusaji Shoji
Mitsuo Nakatani
Ataru Yokono
Tokio Isogai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2851884A priority Critical patent/JPS60121740A/ja
Publication of JPS60121740A publication Critical patent/JPS60121740A/ja
Publication of JPS6331939B2 publication Critical patent/JPS6331939B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP2851884A 1984-02-20 1984-02-20 多層配線構造体 Granted JPS60121740A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2851884A JPS60121740A (ja) 1984-02-20 1984-02-20 多層配線構造体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2851884A JPS60121740A (ja) 1984-02-20 1984-02-20 多層配線構造体

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP9233581A Division JPS57208158A (en) 1981-06-17 1981-06-17 Manufacture of multilayer wiring structure

Publications (2)

Publication Number Publication Date
JPS60121740A JPS60121740A (ja) 1985-06-29
JPS6331939B2 true JPS6331939B2 (enExample) 1988-06-27

Family

ID=12250901

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2851884A Granted JPS60121740A (ja) 1984-02-20 1984-02-20 多層配線構造体

Country Status (1)

Country Link
JP (1) JPS60121740A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2550700B (en) * 2014-11-26 2022-06-08 Esea As A method and device for discharging particulate material

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5393697A (en) * 1994-05-06 1995-02-28 Industrial Technology Research Institute Composite bump structure and methods of fabrication
JP4273356B2 (ja) * 2007-02-21 2009-06-03 セイコーエプソン株式会社 半導体装置の製造方法
TW201741772A (zh) * 2016-02-26 2017-12-01 富士軟片股份有限公司 積層體的製造方法及半導體元件的製造方法
TWI810158B (zh) * 2016-08-01 2023-08-01 日商富士軟片股份有限公司 感光性樹脂組成物、硬化膜、積層體、硬化膜的製造方法、 積層體的製造方法及半導體元件
JP6633767B2 (ja) * 2016-08-25 2020-01-22 富士フイルム株式会社 積層体の製造方法および電子デバイスの製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS559538A (en) * 1978-07-07 1980-01-23 Asahi Chem Ind Co Ltd Heat resistant photoresist composition

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2550700B (en) * 2014-11-26 2022-06-08 Esea As A method and device for discharging particulate material

Also Published As

Publication number Publication date
JPS60121740A (ja) 1985-06-29

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