JPS6331528U - - Google Patents
Info
- Publication number
- JPS6331528U JPS6331528U JP12525286U JP12525286U JPS6331528U JP S6331528 U JPS6331528 U JP S6331528U JP 12525286 U JP12525286 U JP 12525286U JP 12525286 U JP12525286 U JP 12525286U JP S6331528 U JPS6331528 U JP S6331528U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- sliding parts
- rails
- grooves
- longitudinal direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 1
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
Description
第１図はこの考案の半導体熱処理用治具の一実
施例の断面図、第２図ａは同治具における熱処理
ボートの一部斜視図、第２図ｂは第２図ａの円Ｂ
の部分の拡大図、第３図は従来の炉芯管石英チユ
ーブの正面図、第４図は同熱処理ボートの断面図
、第５図ａは同平面図、第５図ｂは同正面図であ
る。
１０……石英チユーブ（炉芯管）、１０ａ，１
０ｂ……レール、３１……ウエハ、４０……熱処
理ボート、４０１……溝、４０ａ……滑動部、４
０ｂ……連結壁、Ａ……接触面。
Figure 1 is a sectional view of an embodiment of the semiconductor heat treatment jig of this invention, Figure 2a is a partial perspective view of a heat treatment boat in the jig, and Figure 2b is circle B in Figure 2a.
Fig. 3 is a front view of a conventional furnace core tube quartz tube, Fig. 4 is a sectional view of the heat treatment boat, Fig. 5 a is a plan view, and Fig. 5 b is a front view. be. 10...Quartz tube (furnace core tube), 10a, 1
0b...Rail, 31...Wafer, 40...Heat treatment boat, 401...Groove, 40a...Sliding part, 4
0b...Connection wall, A...Contact surface.
Claims (1)
半導体熱処理用炉芯管と、 (b) 上記両レールを跨ぐ下向き開放のアングル
状の一対の滑動部、及びこの滑動部相互を上記レ
ール間隔で一体に継ぐ連結壁とからなり、該滑動
部上面に長手方向と直交させて半導体ウエハ装填
用の溝を列設し、該溝が上記滑動部等の壁部を貫
通しない範囲の切込み量であるようにした熱処理
用ボートと、 からなる半導体熱処理用治具。[Scope of Claim for Utility Model Registration] (a) A furnace core tube for semiconductor heat treatment having a pair of rails in the longitudinal direction on the inside thereof; (b) A pair of downward-opening angular sliding parts that straddle both of the rails; and a connecting wall that integrally connects the sliding parts with each other at the above-mentioned rail spacing, grooves for loading semiconductor wafers are arranged in a row perpendicularly to the longitudinal direction on the upper surface of the sliding part, and the grooves are connected to the walls of the sliding parts, etc. A jig for semiconductor heat treatment, comprising: a boat for heat treatment having a cutting depth within a range that does not penetrate the part;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12525286U JPS6331528U (en) | 1986-08-18 | 1986-08-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12525286U JPS6331528U (en) | 1986-08-18 | 1986-08-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6331528U true JPS6331528U (en) | 1988-03-01 |
Family
ID=31017991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12525286U Pending JPS6331528U (en) | 1986-08-18 | 1986-08-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6331528U (en) |
-
1986
- 1986-08-18 JP JP12525286U patent/JPS6331528U/ja active Pending