JPH0371623U - - Google Patents
Info
- Publication number
- JPH0371623U JPH0371623U JP13308789U JP13308789U JPH0371623U JP H0371623 U JPH0371623 U JP H0371623U JP 13308789 U JP13308789 U JP 13308789U JP 13308789 U JP13308789 U JP 13308789U JP H0371623 U JPH0371623 U JP H0371623U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- boat
- semiconductor wafers
- surface area
- increased
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Description
第１図及び第２図は本考案の第１の実施例を示
す図、第３図及び第４図は本考案の第２の実施例
を示す図、第５図及び第６図は本考案の第３の実
施例を示す図、第７図及び第８図は従来の技術を
示す図である。
２１，２５，２９……熱処理用ボート、２２，
２６……炉心管、２３，２７，３０……半導体ウ
エハー、２４……溝、２８……凹部、３１……穴
。
1 and 2 are views showing a first embodiment of the present invention, FIGS. 3 and 4 are views showing a second embodiment of the present invention, and FIGS. 5 and 6 are views showing a second embodiment of the present invention. FIGS. 7 and 8 are diagrams showing a conventional technique. 21, 25, 29... Heat treatment boat, 22,
26... Furnace tube, 23, 27, 30... Semiconductor wafer, 24... Groove, 28... Recess, 31... Hole.
Claims (1)
ーを載置して熱処理装置へ挿入される熱処理用ボ
ートにおいて、 この熱処理用ボートを構成する部材の表面積を
大きくした事を特徴とする熱処理用ボート。[Claims for Utility Model Registration] A heat treatment boat on which semiconductor wafers are placed and inserted into a heat treatment apparatus during heat treatment of semiconductor wafers is characterized in that the surface area of the members constituting the heat treatment boat is increased. Boat for heat treatment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13308789U JPH0371623U (en) | 1989-11-17 | 1989-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13308789U JPH0371623U (en) | 1989-11-17 | 1989-11-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0371623U true JPH0371623U (en) | 1991-07-19 |
Family
ID=31680503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13308789U Pending JPH0371623U (en) | 1989-11-17 | 1989-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0371623U (en) |
-
1989
- 1989-11-17 JP JP13308789U patent/JPH0371623U/ja active Pending