JPH0373430U - - Google Patents
Info
- Publication number
- JPH0373430U JPH0373430U JP13579189U JP13579189U JPH0373430U JP H0373430 U JPH0373430 U JP H0373430U JP 13579189 U JP13579189 U JP 13579189U JP 13579189 U JP13579189 U JP 13579189U JP H0373430 U JPH0373430 U JP H0373430U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- core tube
- furnace core
- holding part
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第１図及び第２図は本考案の第１の実施例の模
式断面図、第３図は第２の実施例における支持棒
及び保持部の斜視図、第４図は第２の実施例の模
式断面図、第５図は従来例の模式断面図である。
１……ボート、２……ウエーハ、３……炉芯管
、４，４Ａ……保持部、５……ボードローラ、６
，６Ａ……支持棒、７……先端部。
1 and 2 are schematic cross-sectional views of the first embodiment of the present invention, FIG. 3 is a perspective view of the support rod and holding part in the second embodiment, and FIG. 4 is a schematic sectional view of the second embodiment. FIG. 5 is a schematic cross-sectional view of a conventional example. 1...Boat, 2...Wafer, 3...Furnace core tube, 4, 4A...Holding section, 5...Board roller, 6
, 6A... Support rod, 7... Tip.
Claims (1)
載せた半導体ウエーハを加熱するための炉芯管と
、前記ボートの保持部を保持しボートを前記炉芯
管内に搬送・搬出するための搬送機とを含むこと
を特徴とする横型熱拡散処理装置。 a boat having a holding part at one end; a furnace core tube for heating semiconductor wafers placed on the boat; and a conveyor for holding the holding part of the boat and transporting the boat into and out of the furnace core tube. A horizontal thermal diffusion processing device comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13579189U JPH0373430U (en) | 1989-11-21 | 1989-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13579189U JPH0373430U (en) | 1989-11-21 | 1989-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0373430U true JPH0373430U (en) | 1991-07-24 |
Family
ID=31683036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13579189U Pending JPH0373430U (en) | 1989-11-21 | 1989-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0373430U (en) |
-
1989
- 1989-11-21 JP JP13579189U patent/JPH0373430U/ja active Pending