JPS6331252B2 - - Google Patents

Info

Publication number
JPS6331252B2
JPS6331252B2 JP59031347A JP3134784A JPS6331252B2 JP S6331252 B2 JPS6331252 B2 JP S6331252B2 JP 59031347 A JP59031347 A JP 59031347A JP 3134784 A JP3134784 A JP 3134784A JP S6331252 B2 JPS6331252 B2 JP S6331252B2
Authority
JP
Japan
Prior art keywords
gas
waste gas
column
gases
diatomaceous earth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59031347A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60175522A (ja
Inventor
Isamu Kitamura
Koichi Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WAARUDO GIKEN KK
Original Assignee
WAARUDO GIKEN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WAARUDO GIKEN KK filed Critical WAARUDO GIKEN KK
Priority to JP59031347A priority Critical patent/JPS60175522A/ja
Publication of JPS60175522A publication Critical patent/JPS60175522A/ja
Publication of JPS6331252B2 publication Critical patent/JPS6331252B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Treating Waste Gases (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
JP59031347A 1984-02-23 1984-02-23 半導体生産工程中の廃ガス乾式処理組成物 Granted JPS60175522A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59031347A JPS60175522A (ja) 1984-02-23 1984-02-23 半導体生産工程中の廃ガス乾式処理組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59031347A JPS60175522A (ja) 1984-02-23 1984-02-23 半導体生産工程中の廃ガス乾式処理組成物

Publications (2)

Publication Number Publication Date
JPS60175522A JPS60175522A (ja) 1985-09-09
JPS6331252B2 true JPS6331252B2 (enrdf_load_html_response) 1988-06-23

Family

ID=12328693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59031347A Granted JPS60175522A (ja) 1984-02-23 1984-02-23 半導体生産工程中の廃ガス乾式処理組成物

Country Status (1)

Country Link
JP (1) JPS60175522A (enrdf_load_html_response)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03137917A (ja) * 1989-10-24 1991-06-12 Iwatani Internatl Corp 水素化物系廃ガスの乾式処理方法
JP2006167688A (ja) * 2004-12-20 2006-06-29 Osaka Gas Chem Kk 金属フィルタ及びそれを用いた酸性ガスの除去方法
EP2030670A1 (en) * 2007-08-31 2009-03-04 Intega GmbH Method and apparatus for removing at least one hydrogen chalcogen compound from an exhaust gas stream
CN109772297B (zh) * 2017-11-15 2022-05-10 宁波市雨辰环保科技有限公司 一种室温下催化活化氧气清除挥发性有机物的催化剂的制备方法及其再生方法与应用

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5399071A (en) * 1977-02-10 1978-08-30 Nec Corp Removing apparatus of exhaust gas
JPS5580722A (en) * 1978-12-12 1980-06-18 Nec Corp Arsenic recovering method
JPS5684618A (en) * 1979-12-12 1981-07-10 Seitetsu Kagaku Co Ltd Method of removing harmful gas for semiconductor
JPS5794323A (en) * 1980-12-03 1982-06-11 Stanley Electric Co Ltd Treating method for waste gas of cvd apparatus
JPS58128146A (ja) * 1982-01-27 1983-07-30 Nippon Sanso Kk 吸収処理剤

Also Published As

Publication number Publication date
JPS60175522A (ja) 1985-09-09

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