JPS5580722A - Arsenic recovering method - Google Patents

Arsenic recovering method

Info

Publication number
JPS5580722A
JPS5580722A JP15454478A JP15454478A JPS5580722A JP S5580722 A JPS5580722 A JP S5580722A JP 15454478 A JP15454478 A JP 15454478A JP 15454478 A JP15454478 A JP 15454478A JP S5580722 A JPS5580722 A JP S5580722A
Authority
JP
Japan
Prior art keywords
arsenic
contg
vapor
gas
temp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15454478A
Other languages
Japanese (ja)
Inventor
Hiroshi Terao
Kesao Noguchi
Hisatsune Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP15454478A priority Critical patent/JPS5580722A/en
Publication of JPS5580722A publication Critical patent/JPS5580722A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To economically recover arsenic with high work efficiency, in vapor phase growth of an arsenic-contg. III-V group element semiconductor, by setting a metallic material at the lower course of a growing region in a reaction tube and keeping the material at a temp. at which at least the material surface becomes a molten state in the presence of arsenic vapor to allow arsenic to be absorbed.
CONSTITUTION: Gas 2 for vapor phase growing an arsenic-contg. IIIWV group element semiconductor such as GaAs, InAs, GaAsP or GaInAS is introduced onto substrate crystal 2 from the upper course of reaction tube 1. Cas 2 is then contacted to arsenic recovering matallic material 5 through backward flow preventing jig 4 to allow arsenic in gas 2 to be absorbed, and arsenic-free exhaust gas is released from exhaust port 6. As material 5 indium, gallium, aluminum, iron, bismuth, platinum or an alloy contg. the metal is used, and it is kept at a temp. enough to hold at least the material surface at a molten state in the presence of arsenic vapor.
COPYRIGHT: (C)1980,JPO&Japio
JP15454478A 1978-12-12 1978-12-12 Arsenic recovering method Pending JPS5580722A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15454478A JPS5580722A (en) 1978-12-12 1978-12-12 Arsenic recovering method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15454478A JPS5580722A (en) 1978-12-12 1978-12-12 Arsenic recovering method

Publications (1)

Publication Number Publication Date
JPS5580722A true JPS5580722A (en) 1980-06-18

Family

ID=15586569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15454478A Pending JPS5580722A (en) 1978-12-12 1978-12-12 Arsenic recovering method

Country Status (1)

Country Link
JP (1) JPS5580722A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60175522A (en) * 1984-02-23 1985-09-09 World Giken:Kk Composition for treating waste gas during semiconductor manufacturing process
US4869735A (en) * 1987-04-30 1989-09-26 Mitsubishi Jukogyo K.K. Adsorbent for arsenic compound and method for removing arsenic compound from combustion gas

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60175522A (en) * 1984-02-23 1985-09-09 World Giken:Kk Composition for treating waste gas during semiconductor manufacturing process
JPS6331252B2 (en) * 1984-02-23 1988-06-23 Waarudo Giken Kk
US4869735A (en) * 1987-04-30 1989-09-26 Mitsubishi Jukogyo K.K. Adsorbent for arsenic compound and method for removing arsenic compound from combustion gas

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