JPS5562727A - Diffusing method of n-type impurity - Google Patents
Diffusing method of n-type impurityInfo
- Publication number
- JPS5562727A JPS5562727A JP13600678A JP13600678A JPS5562727A JP S5562727 A JPS5562727 A JP S5562727A JP 13600678 A JP13600678 A JP 13600678A JP 13600678 A JP13600678 A JP 13600678A JP S5562727 A JPS5562727 A JP S5562727A
- Authority
- JP
- Japan
- Prior art keywords
- type impurity
- phosphorus
- diffused
- gallium
- sulfide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Led Devices (AREA)
Abstract
PURPOSE: To avoid the generation of metamorphic layer on the surface of semiconductor by using sulfide for the diffusion source when n-type impurity is diffused into III-V group compound semiconductor, a component of which is phosphorus by the sealed tube method.
CONSTITUTION: Indium phosphide substrate 1, on which diffusion masks 3 are provided, phosphorus 4 and gallium sulfide 7 are put in a quartz tube 6, which is vacuum-sealed, and is placed in the furnace. Temperature is raised up to 800°C or more, and is kept for a fixed time while sulfur dissociated from the gallium is selectively diffused. After this, the quartz tube is taken from the furnace and rapidly cooled. At this time, when the inner volume of the tube is on the order of 12cc, the amount of phosphorus and gallium sulfide is make about 10mg respectively. In this way, a metamorphic layer is not produced on the surface of substrate, n-type impurity can stably be diffused, the quantity of diffusion source can easily be weighed because it is on the order of several milligram.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13600678A JPS5562727A (en) | 1978-11-02 | 1978-11-02 | Diffusing method of n-type impurity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13600678A JPS5562727A (en) | 1978-11-02 | 1978-11-02 | Diffusing method of n-type impurity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5562727A true JPS5562727A (en) | 1980-05-12 |
Family
ID=15164979
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13600678A Pending JPS5562727A (en) | 1978-11-02 | 1978-11-02 | Diffusing method of n-type impurity |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5562727A (en) |
-
1978
- 1978-11-02 JP JP13600678A patent/JPS5562727A/en active Pending
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