JPS5399071A - Removing apparatus of exhaust gas - Google Patents

Removing apparatus of exhaust gas

Info

Publication number
JPS5399071A
JPS5399071A JP1437777A JP1437777A JPS5399071A JP S5399071 A JPS5399071 A JP S5399071A JP 1437777 A JP1437777 A JP 1437777A JP 1437777 A JP1437777 A JP 1437777A JP S5399071 A JPS5399071 A JP S5399071A
Authority
JP
Japan
Prior art keywords
exhaust gas
gas
clogging
reacting
compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1437777A
Other languages
Japanese (ja)
Inventor
Yukinobu Tanno
Original Assignee
Nec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nec Corp filed Critical Nec Corp
Priority to JP1437777A priority Critical patent/JPS5399071A/en
Publication of JPS5399071A publication Critical patent/JPS5399071A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: The above mentioned apparatus, being able to carry out continuous operation without clogging etc. and taken in metal material able to make alloy with Si, reacting with gas, containing Si(compound) in high temperature state.
COPYRIGHT: (C)1978,JPO&Japio
JP1437777A 1977-02-10 1977-02-10 Removing apparatus of exhaust gas Pending JPS5399071A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1437777A JPS5399071A (en) 1977-02-10 1977-02-10 Removing apparatus of exhaust gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1437777A JPS5399071A (en) 1977-02-10 1977-02-10 Removing apparatus of exhaust gas

Publications (1)

Publication Number Publication Date
JPS5399071A true JPS5399071A (en) 1978-08-30

Family

ID=11859348

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1437777A Pending JPS5399071A (en) 1977-02-10 1977-02-10 Removing apparatus of exhaust gas

Country Status (1)

Country Link
JP (1) JPS5399071A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58173826A (en) * 1982-04-05 1983-10-12 Hitachi Ltd Manufacturing device for semiconductor
JPS60175522A (en) * 1984-02-23 1985-09-09 World Giken:Kk Composition for treating waste gas during semiconductor manufacturing process
US5051117A (en) * 1988-12-22 1991-09-24 Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh Process for removing gaseous contaminating compounds from carrier gases containing halosilane compounds
JPH04176118A (en) * 1990-11-08 1992-06-23 Nec Kyushu Ltd Low pressure cvd device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58173826A (en) * 1982-04-05 1983-10-12 Hitachi Ltd Manufacturing device for semiconductor
JPS60175522A (en) * 1984-02-23 1985-09-09 World Giken:Kk Composition for treating waste gas during semiconductor manufacturing process
JPS6331252B2 (en) * 1984-02-23 1988-06-23 Waarudo Giken Kk
US5051117A (en) * 1988-12-22 1991-09-24 Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh Process for removing gaseous contaminating compounds from carrier gases containing halosilane compounds
JPH04176118A (en) * 1990-11-08 1992-06-23 Nec Kyushu Ltd Low pressure cvd device

Similar Documents

Publication Publication Date Title
JPS5399071A (en) Removing apparatus of exhaust gas
JPS5278602A (en) Vacuum degassing of molten metal
JPS5384871A (en) Recovering apparatus for gas
JPS5360310A (en) Continuous annealing method for titanium and titanium alloy
JPS51117343A (en) Gas combustion apparatus
JPS51129872A (en) A process for solidifying and coating collected dust
JPS53140203A (en) Preparation of porous metal
JPS5224997A (en) Method for rust proofing of expansive graphite
JPS51116884A (en) A method for adhering metals and rubbers
GR65681B (en) Method and disposition for at the same time cooling of gas and coccidiosis of scoria
JPS5399006A (en) Horizontal sonde apparatus for blast furnace
JPS5330983A (en) Treating method for solid waste by electric melting
JPS51126910A (en) Process and apparatus for removing liquid metals contained in cover ga s
JPS5223987A (en) Method of sampling molten metal
JPS5278601A (en) Vacuum degassing of molten metal
JPS51146303A (en) A process for treatment of exhaust gas in continuous melting, refining and casting facilities
JPS51132772A (en) Baking apparatus
JPS5421904A (en) Method of separating chips of cemented carbide
JPS5326203A (en) Recovering method and its apparatus for exhausted heat from sintering machine cooler
JPS5230066A (en) Method for disposing of impurities in gas piping
JPS5311803A (en) Reaction ac celerating method with slag by dispersing molten metal
JPS5396760A (en) Case for semiconductor device and production of the same
JPS5438433A (en) Exhaust gas purifier
JPS5397915A (en) Steel making method in electric furnace
JPS52135993A (en) Neutron detector for measuring inside of reactor