JPS6329396B2 - - Google Patents
Info
- Publication number
- JPS6329396B2 JPS6329396B2 JP56009383A JP938381A JPS6329396B2 JP S6329396 B2 JPS6329396 B2 JP S6329396B2 JP 56009383 A JP56009383 A JP 56009383A JP 938381 A JP938381 A JP 938381A JP S6329396 B2 JPS6329396 B2 JP S6329396B2
- Authority
- JP
- Japan
- Prior art keywords
- light emitting
- insulating layer
- film
- thin film
- emitting device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 21
- 239000010408 film Substances 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 16
- 239000010409 thin film Substances 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000007789 gas Substances 0.000 claims description 6
- 239000011261 inert gas Substances 0.000 claims description 5
- 239000012190 activator Substances 0.000 claims description 2
- 238000007733 ion plating Methods 0.000 claims description 2
- 229910052761 rare earth metal Inorganic materials 0.000 claims 1
- 229910052723 transition metal Inorganic materials 0.000 claims 1
- 150000003624 transition metals Chemical class 0.000 claims 1
- 238000001704 evaporation Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56009383A JPS57123684A (en) | 1981-01-23 | 1981-01-23 | Method of producing thin film light emitting element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56009383A JPS57123684A (en) | 1981-01-23 | 1981-01-23 | Method of producing thin film light emitting element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57123684A JPS57123684A (en) | 1982-08-02 |
| JPS6329396B2 true JPS6329396B2 (fr) | 1988-06-13 |
Family
ID=11718923
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56009383A Granted JPS57123684A (en) | 1981-01-23 | 1981-01-23 | Method of producing thin film light emitting element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57123684A (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4529885A (en) * | 1981-12-04 | 1985-07-16 | The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland | Direct current electroluminescent devices |
| JPS6168892A (ja) * | 1984-09-11 | 1986-04-09 | ホ−ヤ株式会社 | 薄膜ｅｌ素子の製造方法 |
| JPS61114494A (ja) * | 1984-11-08 | 1986-06-02 | 松下電器産業株式会社 | 発光素子およびその製造方法 |
-
1981
- 1981-01-23 JP JP56009383A patent/JPS57123684A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57123684A (en) | 1982-08-02 |
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