JPS63288074A - 積層圧電素子 - Google Patents
積層圧電素子Info
- Publication number
- JPS63288074A JPS63288074A JP62124769A JP12476987A JPS63288074A JP S63288074 A JPS63288074 A JP S63288074A JP 62124769 A JP62124769 A JP 62124769A JP 12476987 A JP12476987 A JP 12476987A JP S63288074 A JPS63288074 A JP S63288074A
- Authority
- JP
- Japan
- Prior art keywords
- silver
- piezoelectric
- layers
- green sheets
- added
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010410 layer Substances 0.000 claims abstract description 51
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 27
- 239000011241 protective layer Substances 0.000 claims abstract description 24
- 239000000463 material Substances 0.000 claims abstract description 17
- 229910052709 silver Inorganic materials 0.000 claims abstract description 16
- 239000004332 silver Substances 0.000 claims abstract description 16
- 238000005245 sintering Methods 0.000 claims abstract description 10
- 238000010030 laminating Methods 0.000 claims abstract description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 6
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 6
- 239000010936 titanium Substances 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- 229910052726 zirconium Inorganic materials 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 abstract description 9
- 239000000843 powder Substances 0.000 abstract description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 abstract description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract description 2
- 229910000464 lead oxide Inorganic materials 0.000 abstract description 2
- 229910000480 nickel oxide Inorganic materials 0.000 abstract description 2
- 229910000484 niobium oxide Inorganic materials 0.000 abstract description 2
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 abstract description 2
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 abstract description 2
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 abstract description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 abstract description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 abstract description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- -1 ships Chemical class 0.000 description 1
- 238000007569 slipcasting Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
- H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62124769A JPS63288074A (ja) | 1987-05-20 | 1987-05-20 | 積層圧電素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62124769A JPS63288074A (ja) | 1987-05-20 | 1987-05-20 | 積層圧電素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63288074A true JPS63288074A (ja) | 1988-11-25 |
| JPH0556031B2 JPH0556031B2 (enrdf_load_stackoverflow) | 1993-08-18 |
Family
ID=14893661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62124769A Granted JPS63288074A (ja) | 1987-05-20 | 1987-05-20 | 積層圧電素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63288074A (enrdf_load_stackoverflow) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6221271B1 (en) | 1998-03-23 | 2001-04-24 | Hitachi Metals, Ltd. | Piezoelectric sintered ceramics and piezoelectric ceramic elements constituted thereby |
| US6260248B1 (en) | 1996-04-19 | 2001-07-17 | Siemens Aktiengesellschaft | Method for producing a monolithic multilayer piezo actuator |
| JP2002252386A (ja) * | 2001-02-15 | 2002-09-06 | Ceramtec Ag Innov Ceramic Eng | 圧電セラミック多層アクチュエーター |
| JP2005285883A (ja) * | 2004-03-29 | 2005-10-13 | Kyocera Corp | 積層型圧電素子およびその製造方法ならびにこれを用いた噴射装置 |
| WO2006133992A1 (de) * | 2005-06-14 | 2006-12-21 | Robert Bosch Gmbh | Piezoaktor |
| JP2007073993A (ja) * | 2006-11-21 | 2007-03-22 | Kyocera Corp | セラミック電子部品及び噴射装置 |
| WO2008146878A1 (ja) * | 2007-05-30 | 2008-12-04 | Kyocera Corporation | 積層型圧電素子、噴射装置、燃料噴射システム、及び積層型圧電素子の製造方法 |
| WO2011052528A1 (ja) | 2009-10-28 | 2011-05-05 | 京セラ株式会社 | 積層型圧電素子およびそれを用いた噴射装置ならびに燃料噴射システム |
| JP4878347B2 (ja) * | 2005-01-18 | 2012-02-15 | エプコス アクチエンゲゼルシャフト | 浮遊容量の小さいピエゾアクチュエータ |
-
1987
- 1987-05-20 JP JP62124769A patent/JPS63288074A/ja active Granted
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6260248B1 (en) | 1996-04-19 | 2001-07-17 | Siemens Aktiengesellschaft | Method for producing a monolithic multilayer piezo actuator |
| US6221271B1 (en) | 1998-03-23 | 2001-04-24 | Hitachi Metals, Ltd. | Piezoelectric sintered ceramics and piezoelectric ceramic elements constituted thereby |
| JP2012134528A (ja) * | 2001-02-15 | 2012-07-12 | Ceramtec Ag Innovative Ceramic Engineering | 圧電セラミック多層アクチュエーター |
| JP2002252386A (ja) * | 2001-02-15 | 2002-09-06 | Ceramtec Ag Innov Ceramic Eng | 圧電セラミック多層アクチュエーター |
| JP2005285883A (ja) * | 2004-03-29 | 2005-10-13 | Kyocera Corp | 積層型圧電素子およびその製造方法ならびにこれを用いた噴射装置 |
| JP4878347B2 (ja) * | 2005-01-18 | 2012-02-15 | エプコス アクチエンゲゼルシャフト | 浮遊容量の小さいピエゾアクチュエータ |
| WO2006133992A1 (de) * | 2005-06-14 | 2006-12-21 | Robert Bosch Gmbh | Piezoaktor |
| JP2007073993A (ja) * | 2006-11-21 | 2007-03-22 | Kyocera Corp | セラミック電子部品及び噴射装置 |
| WO2008146878A1 (ja) * | 2007-05-30 | 2008-12-04 | Kyocera Corporation | 積層型圧電素子、噴射装置、燃料噴射システム、及び積層型圧電素子の製造方法 |
| JP2012216875A (ja) * | 2007-05-30 | 2012-11-08 | Kyocera Corp | 積層型圧電素子、噴射装置、燃料噴射システム、及び積層型圧電素子の製造方法 |
| US8339018B2 (en) | 2007-05-30 | 2012-12-25 | Kyocera Corporation | Laminated piezoelectric element, ejection device, fuel ejection system, and method for manufacturing laminated piezoelectric element |
| WO2011052528A1 (ja) | 2009-10-28 | 2011-05-05 | 京セラ株式会社 | 積層型圧電素子およびそれを用いた噴射装置ならびに燃料噴射システム |
| JP5518090B2 (ja) * | 2009-10-28 | 2014-06-11 | 京セラ株式会社 | 積層型圧電素子およびそれを用いた噴射装置ならびに燃料噴射システム |
| US8857413B2 (en) | 2009-10-28 | 2014-10-14 | Kyocera Corporation | Multi-layer piezoelectric element, and injection device and fuel injection system using the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0556031B2 (enrdf_load_stackoverflow) | 1993-08-18 |
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