JPS63283173A - 製膜装置 - Google Patents

製膜装置

Info

Publication number
JPS63283173A
JPS63283173A JP62119372A JP11937287A JPS63283173A JP S63283173 A JPS63283173 A JP S63283173A JP 62119372 A JP62119372 A JP 62119372A JP 11937287 A JP11937287 A JP 11937287A JP S63283173 A JPS63283173 A JP S63283173A
Authority
JP
Japan
Prior art keywords
substrate
film forming
wirings
wire
forming apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62119372A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0533833B2 (esLanguage
Inventor
Kazunaga Tsushimo
津下　和永
Yoshihisa Owada
善久 太和田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanegafuchi Chemical Industry Co Ltd
Original Assignee
Kanegafuchi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanegafuchi Chemical Industry Co Ltd filed Critical Kanegafuchi Chemical Industry Co Ltd
Priority to JP62119372A priority Critical patent/JPS63283173A/ja
Publication of JPS63283173A publication Critical patent/JPS63283173A/ja
Publication of JPH0533833B2 publication Critical patent/JPH0533833B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
JP62119372A 1987-05-15 1987-05-15 製膜装置 Granted JPS63283173A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62119372A JPS63283173A (ja) 1987-05-15 1987-05-15 製膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62119372A JPS63283173A (ja) 1987-05-15 1987-05-15 製膜装置

Publications (2)

Publication Number Publication Date
JPS63283173A true JPS63283173A (ja) 1988-11-21
JPH0533833B2 JPH0533833B2 (esLanguage) 1993-05-20

Family

ID=14759875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62119372A Granted JPS63283173A (ja) 1987-05-15 1987-05-15 製膜装置

Country Status (1)

Country Link
JP (1) JPS63283173A (esLanguage)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04116925A (ja) * 1990-09-07 1992-04-17 Kanegafuchi Chem Ind Co Ltd パターン化薄膜の形成に用いる基板保持治具
JP2012532457A (ja) * 2009-06-30 2012-12-13 エルジー イノテック カンパニー リミテッド 太陽光発電装置及びその製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5123444B2 (ja) * 2000-09-08 2013-01-23 独立行政法人産業技術総合研究所 太陽電池の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04116925A (ja) * 1990-09-07 1992-04-17 Kanegafuchi Chem Ind Co Ltd パターン化薄膜の形成に用いる基板保持治具
JP2012532457A (ja) * 2009-06-30 2012-12-13 エルジー イノテック カンパニー リミテッド 太陽光発電装置及びその製造方法

Also Published As

Publication number Publication date
JPH0533833B2 (esLanguage) 1993-05-20

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